Optical modulation and detection in slotted Silicon waveguides

Baehr‐Jones, Tom; Hochberg, Michael; Wang, Guangxi; Lawson, Rhys; Liao, Yi; Sullivan, Philip A.; Dalton, Larry R.; Jen, Alex K.‐Y.; Scherer, Axel

doi:10.1364/opex.13.005216

Cited by 285 publications

(177 citation statements)

References 12 publications

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“…Electrode spacing can be reduced using standard procedures in high-resolution photomask and alignment technology or by using e-beam patterning. Even more effective means of reducing electrode gaps employs the use of doped silicon electrodes to confine and modulate a 100-nm EO waveguide core [17].…”

Section: Discussionmentioning

confidence: 99%

“…1) [16]. The second system is the chromophore YL124 doped 25% into Poly[Bisphenol A carbonate-co-4,4 -(3,3,5-trimethylcyclohexylidene)diphenol carbonate] (APC); a system that has demonstrated moderate EO activity and thermal stability over 85 C [17]. The third is YL124 doped 25% into a dendritic chromophore host, PSLD41; a system that has enhanced EO activity [18].…”

Section: A Electro-optic Materialsmentioning

confidence: 99%

“…6(b) ]; the details of this process can be found in one of our earlier publications [17]. The ROADM is patterned as four parallel cascaded ring resonator filters horizontally coupled to a common waveguide with 180-nm spacing [Figs.…”

Section: Fabricationmentioning

confidence: 99%

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A Hybrid Electrooptic Microring Resonator-Based $1 \times 4\times 1$ ROADM for Wafer Scale Optical Interconnects

Takayesu

Hochberg

Baehr‐Jones

et al. 2009

J. Lightwave Technol.

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Section: Discussionmentioning

confidence: 99%

Section: A Electro-optic Materialsmentioning

confidence: 99%

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A Hybrid Electrooptic Microring Resonator-Based $1 \times 4\times 1$ ROADM for Wafer Scale Optical Interconnects

Takayesu

Hochberg

Baehr‐Jones

et al. 2009

J. Lightwave Technol.

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“…The linear electro-optic effect can be found in strained silicon [11,12]. Alternatively, the very common technique of spin-coating can be used to add an electro-optic, χ (2) -nonlinear organic cover layer on the modulator waveguide [13][14][15][16] in order to create a silicon-organic hybrid (SOH) device. Applying a voltage then results in an instantaneous, pure phase shift, exactly as in LiNbO 3 .…”

Section: Introductionmentioning

confidence: 99%

Silicon-organic hybrid (SOH) IQ modulator using the linear electro-optic effect for transmitting 16QAM at 112 Gbit/s

Korn¹,

Palmer²,

Yu³

et al. 2013

Opt. Express

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Advanced modulation formats call for suitable IQ modulators. Using the silicon-on-insulator (SOI) platform we exploit the linear electrooptic effect by functionalizing a photonic integrated circuit with an organic χ (2) -nonlinear cladding. We demonstrate that this silicon-organic hybrid (SOH) technology allows the fabrication of IQ modulators for generating 16QAM signals with data rates up to 112 Gbit/s. To the best of our knowledge, this is the highest single-polarization data rate achieved so far with a silicon-integrated modulator. We found an energy consumption of 640 fJ/bit.

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“…[6][7][8] Concepts based on slotted photonic crystal ͑PhC͒ waveguides can exploit slow light mechanisms or high quality factor cavities to achieve very compact device dimensions and have been discussed recently. [9][10][11] We propose a concept using a double heterostructure cavity [11][12][13] in a slotted silicon PhC waveguide, infiltrated with NLO-polymer to operate as an EO-modulator.…”

mentioning

confidence: 99%

Electro-optic modulation in slotted resonant photonic crystal heterostructures

Wülbern¹,

Hampe²,

Petrov³

et al. 2009

Applied Physics Letters

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Two dimensional photonic crystal waveguides in high index materials enable integrated optical devices with an extremely small geometrical footprint on the scale of micrometers. Slotted waveguides are based on the guiding of light in low refractive index materials and a field enhancement in this particular region of the device. In this letter we experimentally demonstrate electro-optic modulation in slotted photonic crystal waveguides based on silicon-on-insulator substrates covered and infiltrated with nonlinear optical polymers. A photonic crystal heterostructure is used to create a cavity, while simultaneously serving as an electrical connection from the slot to the metal electrodes that carry the modulation signal. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3156033͔Electrically driven optical modulation in silicon photonics typically relies on interactions between the optical mode and a free carrier plasma via either carrier depletion, injection, or accumulation. 1-3 The achievable modulation speed using these methods is limited by the time constants related to the injection or removal of carriers from the optical waveguide. In contrast, modulation via nonlinear optical ͑NLO͒ polymers accesses the electronic polarization of the organic molecules, which allows extremely high modulation speeds extending up to frequencies in the terahertz range. 4 Furthermore, molecular engineering of organic molecules has led to extremely high Pockels-coefficients in polymers exceeding 300 pm/V, 5 which is ten times the value available in lithiumniobate, the standard inorganic material used in electro-optic ͑EO͒ applications. Photonic devices based on a hybrid material system merging silicon and polymer are therefore attractive since they combine the strong light confining abilities of silicon with the superior NLO properties of polymers.All-optical and EO-modulation in such hybrid silicon and NLO-polymer systems has been demonstrated for slotted photonic wire based Mach-Zehnder and ring-resonator modulators. 6-8 Concepts based on slotted photonic crystal ͑PhC͒ waveguides can exploit slow light mechanisms or high quality factor cavities to achieve very compact device dimensions and have been discussed recently. 9-11 We propose a concept using a double heterostructure cavity 11-13 in a slotted silicon PhC waveguide, infiltrated with NLO-polymer to operate as an EO-modulator. Figure 1 shows a scanning electron micrograph of the structure. The 150 nm wide slot in the center of the waveguide is filled with NLO-polymer ͑n poly = 1.63͒ and the strong overlap between the optical field and the polymer makes the effective index of the propagating mode very sensitive to any refractive index changes in EOpolymer. The PhC features a background doping density of 10 15 cm −1 and therefore serves as an electrical conductor from the metallic contact pads to the slot, while keeping the optical field away from the metal regions and hence preventing additional losses. The double heterostructure design of the PhC ͑a = 410 nm, r / a = 0....

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Optical modulation and detection in slotted Silicon waveguides

Cited by 285 publications

References 12 publications

A Hybrid Electrooptic Microring Resonator-Based $1 \times 4\times 1$ ROADM for Wafer Scale Optical Interconnects

A Hybrid Electrooptic Microring Resonator-Based $1 \times 4\times 1$ ROADM for Wafer Scale Optical Interconnects

Silicon-organic hybrid (SOH) IQ modulator using the linear electro-optic effect for transmitting 16QAM at 112 Gbit/s

Electro-optic modulation in slotted resonant photonic crystal heterostructures

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