Optical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputtering

Özen, Soner; Şenay, Volkan

doi:10.1016/j.ijleo.2019.163433

Cited by 8 publications

(4 citation statements)

References 37 publications

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“…The images showed smooth and homogeneous films being the surface roughness minimum for the as-grown samples (r < 1 nm) and increased gradually after heating at 300 • C (r ≈ 2 nm) and 500 • C (r ≈ 3 nm). These values were in the same order than those reported for analogous NiO [41][42][43] and Cr 2 O 3 [32,38,44] thin films. The increment of the roughness with the annealing temperature was related to the recrystallization process [32,43] and the consequent enlargement of the mean crystallite size, as confirmed by the XRD data.…”

Section: Resultssupporting

confidence: 85%

“…The morphology of the various NiO and Cr2O3 layers is illustrate includes representative AFM images taken on 2 μm × 2 μm areas to spective root-mean-square roughness (r). The images showed smooth films being the surface roughness minimum for the as-grown sample creased gradually after heating at 300 °C (r ≈ 2 nm) and 500 °C (r ≈ 3 were in the same order than those reported for analogous NiO [32,38,44] thin films. The increment of the roughness with the annealin related to the recrystallization process [32,43] and the consequent mean crystallite size, as confirmed by the XRD data.…”

Section: Resultssupporting

confidence: 64%

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Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Guillén

Herrero

2021

Electronic Materials

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NiO and Cr2O3 are transition metal oxides with a partially filled d electron band that supports p-type conduction. Both are transparent to the visible light due to optical absorption beginning at wavelengths below 0.4 μm and the creation of holes by metal vacancy defects. The defect and strain effects on the electronic characteristics of these materials need to be established. For this purpose, NiO and Cr2O3 thin films were deposited on unheated glass substrates by reactive DC sputtering from metallic targets. Their structural, morphological, optical and electrical properties were analyzed comparatively in the as-grown conditions (25 °C) and after heating in air at 300 °C or 500 °C. The cubic NiO structure was identified with some tensile strain in the as-grown conditions and compressive strain after heating. Otherwise, the chromium oxide layers were amorphous as grown at 25 °C and crystallized into hexagonal Cr2O3 at 300 °C or above also with compressive strain after heating. Both materials achieved the highest visible transmittance (72%) and analogous electrical conductivity (~10−4 S/cm) by annealing at 500 °C. The as-grown NiO films showed a higher conductivity (2.5 × 10−2 S/cm) but lower transmittance (34%), which were related to more defects causing tensile strain in these samples.

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Section: Resultssupporting

confidence: 85%

Section: Resultssupporting

confidence: 64%

Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Guillén

Herrero

2021

Electronic Materials

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“…Chromium oxide (C 2 O 3 ) films have shown promising surface and mechanical properties in the past. 22,23 In previous work, Cr 2 O 3 /CrN coating was deposited on DIN 1.2888 tool steel to investigate the die life in the production of Al-alloy components. It was reported that Cr 2 O 3 /TiN thin films showcased a low coefficient of friction and greater oxidation resistance at 900 • C temperature during die casting application.…”

Section: Introductionmentioning

confidence: 99%

“…Chromium oxide (C 2 O 3 ) films have shown promising surface and mechanical properties in the past 22,23 . In previous work, Cr 2 O 3 /CrN coating was deposited on DIN 1.2888 tool steel to investigate the die life in the production of Al‐alloy components.…”

Section: Introductionmentioning

confidence: 99%

Wear assessment of Cr₂O₃‐/TiAlN‐coated DAC‐10 tool steel against steel and Al₂O₃ counterbodies

Kumar

Maity

Patnaik

2021

Int J Applied Ceramic Tech

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TiAlN film was deposited on Cr2O3‐coated plasma‐nitrided DAC‐10 tool steel to obtained multilayer Cr2O3/TiAlN coating layer using cathodic arc deposition technique. The structural make‐up of the coating was characterized using Atomic Force Microscopy (AFM) and X‐ray diffraction methods, and the mechanical properties were evaluated using nanoindentation and nanoscratch test. The structural phases of the coating indicated the presence of crystalline CrO structure and cubic TiAlN phases. The coating showcased improved hardness (38 GPa), elastic modulus (387 GPa), and adhesion along with appreciable H/E (0.09) and H3/E2 (0.366 GPa) attributes. Further, friction‐induced wear behavior of the coating was investigated against steel and Al2O3 counterbodies under dry sliding conditions. The wear behavior of the coating was greatly influenced by its hardness and deformation properties and frictional behavior of the counterbodies. More spikes and fluctuation were observed in the frictional curve against Al2O3 counterbody attributed to the emanation of TiO2, Cr2O3, and Al2O3 compounds due to dry sliding leading to the formation of flakes and delamination induced debris. Against the steel counterbody, the coating mainly formed a typical smooth glossy surface ascribed to the formation of Fe2O3 compound on the worn surface.

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Temperature-dependent gas sensor application of chromium oxide structure

Sarıtaş

2023

J Mater Sci: Mater Electron

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Optical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputtering

Cited by 8 publications

References 37 publications

Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Wear assessment of Cr₂O₃‐/TiAlN‐coated DAC‐10 tool steel against steel and Al₂O₃ counterbodies

Temperature-dependent gas sensor application of chromium oxide structure

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Optical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputtering

Cited by 8 publications

References 37 publications

Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Structural Changes Induced by Heating in Sputtered NiO and Cr2O3 Thin Films as p-Type Transparent Conductive Electrodes

Wear assessment of Cr2O3‐/TiAlN‐coated DAC‐10 tool steel against steel and Al2O3 counterbodies

Temperature-dependent gas sensor application of chromium oxide structure

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Wear assessment of Cr₂O₃‐/TiAlN‐coated DAC‐10 tool steel against steel and Al₂O₃ counterbodies