The 2nd International Conference on Physical Instrumentation and Advanced Materials 2019 2020
DOI: 10.1063/5.0033176
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Optical parameters and energy gap estimation in hafnia thin film

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Cited by 5 publications
(6 citation statements)
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“…Nevertheless, the obtained E g value is in agreement with other independent data. In particular, for HfO 2 thin films of produced by ion beam sputtering deposition method E g = 5.4 ± 0.05 eV [6]. For the films synthesized using atomic-layer deposition technique energy gap value is 5.55 eV [7].…”
Section: Discussionmentioning
confidence: 98%
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“…Nevertheless, the obtained E g value is in agreement with other independent data. In particular, for HfO 2 thin films of produced by ion beam sputtering deposition method E g = 5.4 ± 0.05 eV [6]. For the films synthesized using atomic-layer deposition technique energy gap value is 5.55 eV [7].…”
Section: Discussionmentioning
confidence: 98%
“…Along with the other IVB metal oxides (ZrO 2 , TiO 2 ) HfO 2 is considered to be a promising solid-state medium for creation of the non-volatile memory cells because of its physical properties and favorable valence and conduction band alignments [1][2][3][4][5]. Due to wide energy gap and high refractive index hafnia is used as optical coatings [6]. As downscaling of field effect transistors has become difficult, HfO 2 could also be a candidate to replace SiO 2 as gate dielectric [7].…”
Section: Introductionmentioning
confidence: 99%
“…Manipulating the morphology of the synthesized oxide layer-solid → porous → nanotubular-can be performed by varying both the electrolyte composition and parameters of electrochemical synthesis, such as a voltage between the electrodes, current flowing through the solution, oxidation time, and temperature [16]. In turn, the geometric parameters and phase composition of NTs have a dramatic influence on the features of their electronic subsystem and various structure-sensitive capabilities [18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, there are widespread methods to synthesize HfO 2 thin films supported on quartz and silicon substrates by atomic layer deposition and magnetron sputtering [9,[17][18][19][20][21]. However, the low-dimensional structures obtained in such a way are, as a rule, amorphous and crystallize only after hightemperature annealing [9,22].…”
Section: Introductionmentioning
confidence: 99%
“…Despite the availability of samples with different morphologies to test, the literature chiefly comprises data on luminescence for HfO 2 films doped with ions of various chemical elements [9,12,17,[21][22][23][24][25]. In this context, the properties of luminescent nominally pure structures still remain largely unexplored.…”
Section: Introductionmentioning
confidence: 99%