2022
DOI: 10.1088/1674-1056/ac7c02
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Optical properties of He+-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

Abstract: TGG crystal can be used to fabricate various magneto-optical devices, due to its optimum Faraday Effect. In this work, 400-keV He+ ions with a fluence of 6.0 × 1016 ions/cm2 were irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with the rotation speed of 20,000 rpm and the cutting velocity of 0.1 mm/s was performed on the He+-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He+-implanted TGG planar waveguide was measured b… Show more

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Cited by 10 publications
(9 citation statements)
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“…The development of optical ion-implanted waveguides with potential application is closely related to the energy and dose of irradiated ions [20]. For example, the higher the energy is, the greater the depth of the barrier (i.e.…”
Section: Resultsmentioning
confidence: 99%
“…The development of optical ion-implanted waveguides with potential application is closely related to the energy and dose of irradiated ions [20]. For example, the higher the energy is, the greater the depth of the barrier (i.e.…”
Section: Resultsmentioning
confidence: 99%
“…By contrast, some crystals induced by ion implantation would cause compaction, resulting in an increase in the refractive index in the implantation region. 16 The region of the increased refractive index is called the enhanced well.…”
Section: Introductionmentioning
confidence: 99%
“…A waveguide structure is formed between the barrier layer with the low refractive index and the air on the material surface. By contrast, some crystals induced by ion implantation would cause compaction, resulting in an increase in the refractive index in the implantation region 16 . The region of the increased refractive index is called the enhanced well.…”
Section: Introductionmentioning
confidence: 99%
“…3 According to the different structures, it can be generally divided into planar and strip waveguides. 4 Planar waveguides can confine the propagation of light in one dimension, while strip ones can confine the propagation of light in two dimensions. 5 Compared with planar waveguides, strip ones can improve the integration efficiency and compactness of the optical devices based on waveguides.…”
Section: Introductionmentioning
confidence: 99%
“…Relying on the principle of total internal reflection, the waveguide restricts light to propagate in a certain direction 3 . According to the different structures, it can be generally divided into planar and strip waveguides 4 . Planar waveguides can confine the propagation of light in one dimension, while strip ones can confine the propagation of light in two dimensions 5 .…”
Section: Introductionmentioning
confidence: 99%