Optical properties of hydrogenated amorphous carbon thin films prepared by dc saddle field plasma-enhanced chemical vapor deposition

Generation of radical species in CVD grown pristine and N-doped solid carbon spheres using H2 and Ar as carrier gases

“…This enhanced the electrochemical reactivity 23 of the battery. Not only does hydrogen inuence the sp 2 /sp 3 ratio and the electrochemical reactivity of carbon nanomaterials, it also impacts on the mechanical, 24,25 electronic 21 and optical 21,26 properties of carbon nanomaterials. Carbon spheres are known to comprise of a mixture of sp 2 and sp 3 hybridized carbons and with a variable number of defects.…”

Application of amorphous carbon based materials as antireflective coatings on crystalline silicon solar cells

“…One way to circumvent the problem of the high refractive index of a-C films with high sp 3 concentration would be the use of hydrogenated amorphous carbon (a-C:H). Figure 6 displays several results reported in the literature 38,[45][46][47] for the refractive index (at about 632 nm) for a-C:H films prepared by different techniques. Films with an intermediate concentration of sp 3 sites are usually deposited by PECVD 10,40 on the biased electrode (cathode), and is usually referred to as a DLC.…”

Stability of hydrogenated amorphous carbon thin films for application in electronic devices

“…In recent years, hydrogenated amorphous carbon (a-C:H) films have attracted extensive attention because it endowed with a number of distinctive physical prosperities, such as high elastic modulus, extreme mechanical hardness, chemical inertness, and reduced surface roughness, thus making it a valuable unique material for a wide range of applications [1], [2], [3], [4], [5]. Of particular note are its exceptional properties including low-dielectric constant and wide optical bandgap, and these will facilitate the use of a-C:H as a semiconductor and/or low-k insulator thin film in almost all kinds of electronic applications [6], [7].…”

“…This includes low fabrication cost, fabrication at room temperature, high mechanical flexibility and a good ability to adhere on to various substrates such as glass, plastic, silicon wafer (Si) and metal sheets/foils [5], [7], [11].…”

“…In this work, we investigate the chemical resistance and temperature endurance of a-C:H thin films with an aim it to be exploited in electronic devices. Although, a number of studies have been reported on amorphous carbon [2], [7], [20], [21], [22], [23], [24], [25], to the best of our knowledge, there is no report on the investigation of post deposition heat treatment and exposure to commonly used organic solvents, in electronic industry, and the electrical and optical properties of a-C:H films deposited by RF-PECVD. Thus, this work will be the first study to focus on the understanding of stability, if any, of its properties as a function of annealing temperature and chemical resistance to commonly used organic solvents in semiconductor industries.…”