Optical Properties of Ta₂O₅/SiO₂ Antireflection Coating System

Abstract

Abstract. The Ta 2 O 5 /SiO 2 multi-layer Antireflection coating is prepared on K9 glass by RF magnetron sputtering technology in the experiment. The growth parameters are changed to get multi-layer Antireflection film with good optical properties. In the technical research, the influence of various growth parameters, including working pressure, oxygen content, substrate temperature, etc., on the optical properties and structures of the coatings are studied. Optical properties and morphological features such as surface, structure are investigated by UV-VIS spectrophotometer and AFM, respectively. The detecting results further verify the important influences of proper growth parameters on optical properties of antireflection coating.

Antireflective Double Layer Coating Based on SiO2/MgF2 Films with Various Substrate BK7 Glass and Corning Glass

“…There are currently two basic ways to achieve the antireflection effect: the first is to deposit thin films on the substrate, such as single layer [6], double layer [7], and multilayer films [8, IOP Publishing doi:10.1088/1742-6596/2780/1/012011 2 9], and the second is to include graded refractive index (GRIN) coatings [10]. In the recent past, there have been numerous reports on antireflection coatings based on transparent materials, Xiaoyu et al prepared MgF2/SiO2 broadband ARC [11] , Kontanti et al present bilayer ARC based Al2O3/MgF2 and Al2O3/SiO2 [12], multilayer ARC based TiO2/MgF2 by resistive thermal evaporation and electron beam methods are presented by Waqar et al [9], Saoni introduces antireflection of Ta2O5/SiO2 [13].…”