Optical reflective filter with comb-drive nickel micromirror for optical fiber communication

Akimoto, Koji; Uenishi, Yuji; Honma, K.; Nagaoka, Shiro

doi:10.1109/ectc.1997.606234

Cited by 3 publications

(1 citation statement)

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“…Actuators based on the physical principle of electrostatics have been widely investigated in MEMS. Actuators operating in two and three dimensions have been demonstrated and integrated in applications such as STM/AFM [7], optical switching devices [8,9] or microgrippers [10]. The strongest advantage over piezoelectric actuation is the large translation offered by electrostatic actuation [11].…”

Section: Introductionmentioning

confidence: 99%

A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips

Gollasch

Moktadir

Kraft

et al. 2005

J. Micromech. Microeng.

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A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning optical microcavities on atom chips is presented. The design of the 3D actuator is outlined in detail, and its characteristics are verified by analytical calculations and finite element modelling. Furthermore, the fabrication process of the actuation device is described and preliminary fabrication results are shown. The actuation in the chip plane which is used for mirror positioning has a working envelope of 17.5 µm. The design incorporates a unique locking mechanism which allows the out-of-plane actuation that is used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 µm can be achieved in the out-of-plane direction.

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