Optical, structural, electrical and optoelectronic properties of hydrogenated amorphous Si1?x C x alloy thin films prepared by planar magnetron sputtering method

Physics of Amorphous Silicon–Carbon Alloys

“…The most severe problem with C + Si COsputtering, however, is the possibility of carbon clustering. Saito et al [53] have found in ESCA spectra of co-sputtered films even at x = 0.2 a peak characteristic of graphite. The abnormal optical properties of their films suggest that up t,o x = 0.5 to 0.6 most of the carbon is incorporated inhomogeneously in graphite clusters.…”

“…Dutta et al [ZS] have prepared a-Sil-,C,:P films by sputtering of Sic in Ar + + SiF4. Reactive co-sputtering of a composite target of silicon and graphite has been used in several works, most recently by Saito et al [53]. Co-sputtering has several disadvantages compared to sputtering from a simple target, First of all the target preparation is difficult and perhaps not entirely reproducible.…”

A passivating contact for silicon solar cells formed during a single firing thermal annealing

“…The FTIR measurements depicted in Figure 7 (a) reveal the presence of various peaks. The first one is centered at 630 cm -1 and is associated to Si-H wagging or rocking modes 35,36 followed by the Si-C stretching mode 35,36 centered at 780 cm -1 while the Si-O stretching modes 37 appear at 1050 cm -1 . The band centered at 2050 cm -1 is attributed to Si-Hn stretching modes 35 (with n=1, 2, 3).…”

Chemical (dis)order in a-Si1−xCRovira1, Alvarez2 1997Phys. Rev. B620180View full textAdd to dashboardCite

“…We remark that some previous works report this behavior for the optical gap of PECVD-and SPdeposited materials. 9,21,27,65 However, most of these studies reported materials where the gap increases monotonically on carbon content for 0ϽxϽ0.6. 70 For comparison purposes, in Fig.…”

“…2-26͒ and rf sputtering ͑SP͒. [27][28][29][30][31][32][33][34][35][36][37][38][39][40][41][42] As shown in Table I, the question of the local environment of the constituent atoms of the alloy is still a matter of debate. Indeed, the understanding of the local arrangement of the atoms is important for future improvements of optical and transport properties of the material.…”