Frequency-modulated continuous wave
(FMCW) LiDAR can achieve long-distance
and high-precision measurement, and the ranging error mainly comes
from the nonlinearity of the laser frequency sweep. In this study,
a high-precision silicon-integrated FMCW LiDAR is proposed. An equal
frequency hypercube network is established by the stable free spectral
range (FSR) of the microresonator to calibrate the nonlinearity of
FMCW, and the distance matrix is obtained by analyzing the phase difference
matrix of the FMCW signal. A standard length-based microresonator
FSR calibration scheme is used to further improve the LiDAR accuracy.
The feasibility of the scheme is verified by ranging and three-dimensional
(3D) imaging. The ranging is carried out indoors and outdoors. In
the indoor environment of a distance of 4 m, the minimum Allan deviation
is 65 nm at 10.24 s. In the outdoor environment, the minimum Allan
deviation at 438 m is 420 nm at 10.24 s. The 3D imaging can reconstruct
the spatial point cloud of the objects and identify the spatial targets.
This scheme has good on-chip integration capability and can be further
combined with lens-assisted beam steering and optical phased array,
laying the foundation for compact, large bandwidth, long-range, and
high-precision LiDAR.