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20061226006ABSTRACT Single-crystal PbTiO 3 layers were grown on (001) SrTiO 3 substrates by molecular beam epitaxy using hydrogen peroxide as an oxidant. Phase composition and structural properties of the films were examined as a function of growth parameters. It was found that single-phase PbTiO 3 films grew epitaxially at substrate temperatures of 600'C and higher, whereas layers grown at lower temperature contained PbO inclusions. The epitaxial relationship between the films and the substrates was (001)PbTiO 3 //(001)SrTiO 3 and PbTiO 3 [100]//SrTiO 3 [100]. No evidence of a-domains was found. Full widths at half maximum of (001) PbTiO 3 rocking curves were as low as 6-8 arcmin for 50-60 nm thick films, indicating high crystal quality of the films. From ellipsometric measurements, refractive index and band gap of PbTiO 3 were found to be 2.66 at 633 nm and 3.8 eV, respectively.