Optimal Design for the Structure Parameters of Long Raster Engraving Air-floating Platform

Abstract

Air-floating platform is the core component of long raster engraving system. In order to design an air-floating platform to greatly meet the demands of long raster engraving, this paper, based on the validation of simulation model accuracy by test platform, proposes a three-dimension finite element model about gas film, and investigates the influence of the gas film thickness, air pressure and width of bottom guideway on the loaded capacity and air consumption by orthogonal test method. Then the best design plan of air-floating platform structure was determined by range analysis method. The results showed that air film thickness H=0.02 mm, gas supply pressure Ps=0.15 MPa, width of bottom guideway Bx=140 mm, the loading capacity of single-sided guideway is about 3177 N, its air consumption is 191487 mm3/s. Hence, this plan can not only meet the requirements of the loading capacity but also reduce air consumption of air-floating platform so as to provide a basis for optimum structure design about air-floating platform.

Application of gas bearing in hydrogen liquefaction field

“…When one surface moves relative to the other, the gas acts as a lubricant to form a gas wedge between the two surfaces, creating pressure. Aerodynamic bearings are a simple and ingenious bearing, completely self-contained and independent of external pressure sources or other equipment [3][4]. The support of the extruded film bearing also does not require an additional air source, unlike the pneumatic bearing, the bearing moves in a vibrating pattern and the direction is perpendicular to the bearing surface, resulting in pressure [2][3][4].…”

“…Aerodynamic bearings are a simple and ingenious bearing, completely self-contained and independent of external pressure sources or other equipment [3][4]. The support of the extruded film bearing also does not require an additional air source, unlike the pneumatic bearing, the bearing moves in a vibrating pattern and the direction is perpendicular to the bearing surface, resulting in pressure [2][3][4]. Gas hydrostatic bearings generally rely on the external air source to provide the air film pressure, the external air source can be compressor or air compressor and other equipment, the compressed gas bearing inlet hole into the bearing clearance, the bearing is suspended and discharged from the other side of the bearing, this process is continuous, and to ensure that the pressure of the air source is stable to prevent friction damage to the bearing [5].…”

“…Gas suspension bearings can be understood as two finishing surfaces whose clearance trend is hindered by changes in air film pressure [1][2][3]. They are mainly divided into three basic types: gas dynamic pressure bearings, extruded film bearings and gas hydrostatic bearings, and their structural compositions are shown in fig.…”

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

“…The motivations in lithography are mainly composed of behaviors in 22 Copyright 2020, The Authors, published by KAUNAS UNIV TECHNOL Air-core motor is a common driving device to support and control the movement in the Z-direction in the photolithography. The photolithography with an air-core motor possesses the advantage of low vibrations, low acoustic noise, high precision and low power loss.…”

“…(B) Gas film with 3x3 restrictor and pressure groove. Reproduced under terms of the CC‐BY license 22 . Copyright 2020, The Authors, published by KAUNAS UNIV TECHNOL…”