2010
DOI: 10.1016/j.jcrysgro.2009.11.055
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Optimization of crystal growth by changes of flow guide, radiation shield and sidewall insulation in Cz Si furnace

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Cited by 43 publications
(22 citation statements)
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“…The maximum von Mises stress in the case-A, case-B, case-C, case-D and case-E corresponding to 3.25E7 Pa, 3.01E7 Pa, 2.98E7 Pa, 2.96E7 Pa and 3.01E7 Pa. The critical thermal stress for silicon is 2.5 E7 Pa. [22] In case-A (conventional) 7 % of the ingot volume is above critical stress value and in the modified cases 2.5 % of the ingot volume is above critical value. The maximum region of the conventional and modified grown ingots are in the range below the critical value.…”
Section: Von Mises Stressmentioning
confidence: 88%
“…The maximum von Mises stress in the case-A, case-B, case-C, case-D and case-E corresponding to 3.25E7 Pa, 3.01E7 Pa, 2.98E7 Pa, 2.96E7 Pa and 3.01E7 Pa. The critical thermal stress for silicon is 2.5 E7 Pa. [22] In case-A (conventional) 7 % of the ingot volume is above critical stress value and in the modified cases 2.5 % of the ingot volume is above critical value. The maximum region of the conventional and modified grown ingots are in the range below the critical value.…”
Section: Von Mises Stressmentioning
confidence: 88%
“…In order to reduce costs, improvements in the hot zone's design (lower argon and power consumption, increase pulling rate) and the crucible (lower cost and longer lifetime) are needed. A 35% increase in the pulling rate was proposed through the optimization of the argon flow guide, the geometries of the radiation shield, and the side/bottom insulations [65]. By optimizing the original argon flow path, the heater and graphite susceptor lifetimes can be significantly lengthened.…”
Section: Cz Growth Optimizationmentioning
confidence: 99%
“…C pq число узлов сетки, принадлежащих процессору p, которые необходимы процессору q для выполнения итерации. Зависимость хральского [391,392,393,394,395]).…”
Section: параллельные вычисленияunclassified