Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides

Podlucký, Ľuboš; Vincze, Á.; Kováčová, Soňa; Chlpík, Juraj; Kováč, J.; Uherek, F.

doi:10.3390/coatings11050574

Cited by 10 publications

(4 citation statements)

References 24 publications

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“…As a light source, a 50 µm wide beam with a Gaussian profile was chosen to represent direct coupling with multi-mode fibre and to neglect the offset for the possibility of lacking excitation for some modes, due to the fibre position. While transmission spectra of waveguide cores with refractive indices of 2.0 (pure Si 3 N 4 ) and 1.8 (SiON) do not exhibit any differentiable dip, for the waveguiding core with a refractive index of 1.55 (still well in the range of possibilities of SION material platform [20,21]) the spectrum exhibits strong dip between 500 and 600 nm of wavelength. Such core was used to analyse the influence of the analyte's index of refraction variation with a significant shift corresponding to the change.…”

Section: Methodsmentioning

confidence: 97%

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Design of Optimal SPR-Based Multimode Waveguide Sensor for a Wide Range of Liquid Analytes

et al. 2023

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Surface plasmon resonance (SPR)-based sensors have attracted huge interest due to their ability to provide real-time sensing of a wide range of quantities, while still boasting high sensitivity, low cost, and electromagnetic immunity. Among various types of these sensors, waveguide-based sensors show great promise in terms of integrability into more complex circuits while still maintaining similar sensitivity and versatility as their stand-alone counterparts. This paper presents the results of investigation based on design and simulation of optimal parameters for multimode SPR-based waveguide sensor sensitive to any commonly used liquid analytes. The sensitivity for a wider range of analytes is achieved by utilisation of SiON material platform because refractive index adjustability of SiON offers a way to tailor sensor’s sensitivity to exact applications and analytes. One of the research goals in this work was to show that multi-mode waveguides may be suitable for such sensors with comparable sensitivity and higher transmission rates as single-mode waveguides. To showcase design possibilities, two variations with the same design and material’s refractive index adjustment only were investigated, and their optimal parameters have been found. Sensitivity for all commonly used liquid analytes was validated, with sensitivity rising to 1400 nm/RIU for label-free refractive index sensing, even without the use of any sensitivity-enhancing structures.

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Section: Methodsmentioning

confidence: 97%

“…Photonics 2023, 10, 618 4 of 10 index of 1.55 (still well in the range of possibilities of SION material platform [20,21]) the spectrum exhibits strong dip between 500 and 600 nm of wavelength. Such core was used to analyse the influence of the analyte's index of refraction variation with a significant shift corresponding to the change.…”

Section: Methodsmentioning

confidence: 99%

Design of Optimal SPR-Based Multimode Waveguide Sensor for a Wide Range of Liquid Analytes

et al. 2023

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“…For the light trapping efficiency (LTE) and light transmission of solar cells, a simple and cost-effective was proposed in this work. For the survey about SiON, the prepared thick film of SiON was characterized by a good transmittance of approximately 95% in the visible-light spectrum [55]. Additionally, the silicon nitride (SiN) light transmittance curve is approximately close to SiON and good in the solar cell light absorption range, making it suitable for application in solar cell antireflection coatings with SiON and high transmission with respect to SiN in the visible spectrum [56].…”

Section: Arcmentioning

confidence: 99%

The Design and Optimization of an Anti-Reflection Coating and an Intermediate Reflective Layer to Enhance Tandem Solar Cell Photons Capture

et al. 2021

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We have theoretically demonstrated an efficient way to improve the optical properties of an anti-reflection coating (ARC) and an intermediate reflective layer (IRL) to enhance tandem solar cell efficiency by localizing the incident photons’ energy on a suitable sub-cell. The optimum designed ARC from a one-dimensional ternary photonic crystal, consisting of a layer of silicon oxynitride (SiON), was immersed between two layers of (SiO2); thicknesses were chosen to be 98 nm, 48 nm, and 8 nm, respectively. The numerical results show the interesting transmission properties of the anti-reflection coating on the viable and near IR spectrum. The IRL was designed from one-dimensional binary photonic crystals and the constituent materials are Bi4Ge3O12 and μc-SiOx: H with refractive indexes was 2.05, and 2.8, respectively. The numbers of periods were set to 10. Thicknesses: d1 = 62 nm and d2 = 40 nm created a photonic bandgap (PBG) in the range of [420 nm: 540 nm]. By increasing the second material thickness to 55 nm, and 73 nm, the PBG shifted to longer wavelengths: [520 nm: 630 nm], and [620 nm: 730 nm], respectively. Thus, by stacking the three remaining structures, the PBG widened and extended from 400 nm to 730 nm. The current theoretical and simulation methods are based on the fundamentals of the transfer matrix method and finite difference time domain method.

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“…The manner in which corrosion inhibitors bond to the surface is critical in determining whether they can effectively mitigate corrosion. The latter can be investigated using surface analytical techniques, in particular X-ray photoelectron spectroscopy (XPS) and time-offlight secondary ion mass spectrometry (ToF-SIMS) [22][23][24][25][26][27][28]. The recent development of gas cluster ion beam (GCIB) technology in combination with surface analytical techniques enables a detailed study of very thin surface layers [29][30][31][32][33][34][35], e.g., the very thin surface layers of corrosion inhibitors.…”

Section: Introductionmentioning

confidence: 99%

2-Phenylimidazole Corrosion Inhibitor on Copper: An XPS and ToF-SIMS Surface Analytical Study

Finšgar

2021

Coatings

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This work presents a surface analytical study of the corrosion inhibitor 2-phenylimidazole (2PhI) adsorbed on a Cu surface from 3 wt.% NaCl solution. X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) were used to investigate the surface phenomena. Various XPS experiments were performed, i.e., survey- and angle-resolved high-resolution XPS spectra measurements, gas cluster ion beam sputtering in conjunction with XPS measurements, and XPS imaging in conjunction with principal component analysis. These measurements were used to detail the composition of the surface layer at depth. In addition, various ToF-SIMS experiments were performed, such as positive ion ToF-SIMS spectral measurements, ToF-SIMS imaging, and cooling/heating in conjunction with ToF-SIMS measurements. This study shows that organometallic complexes were formed between 2PhI molecules and Cu ions, that the surface layer contained entrapped NaCl, that the surface layer contained some Cu(II) species (but the majority of species were Cu(I)-containing species), that the surface was almost completely covered with a combination of 2PhI molecules and organometallic complex, and that the temperature stability of these species increases when 2PhI is included in the organometallic complex.

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Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides

Cited by 10 publications

References 24 publications

Design of Optimal SPR-Based Multimode Waveguide Sensor for a Wide Range of Liquid Analytes

Design of Optimal SPR-Based Multimode Waveguide Sensor for a Wide Range of Liquid Analytes

The Design and Optimization of an Anti-Reflection Coating and an Intermediate Reflective Layer to Enhance Tandem Solar Cell Photons Capture

2-Phenylimidazole Corrosion Inhibitor on Copper: An XPS and ToF-SIMS Surface Analytical Study

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