Optimization of femtosecond laser processing of silicon via numerical modeling

Taylor, L. L.; Qiao, Jun; Qiao, Jie

doi:10.1364/ome.6.002745

Cited by 41 publications

(17 citation statements)

References 43 publications

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“…9 Further fundamental studies of different research groups show the increasing relevance of laser polishing process of glass. [10][11][12][13][14][15] However, the so far achieved roughness with laser polishing is not sufficient for imaging optics due to a roughness Sa > 1 nm for spatial wavelengths of k > 100 lm. In addition, most researches were focused on fused silica.…”

Section: State Of the Artmentioning

confidence: 99%

Laser polishing and laser shape correction of optical glass

Weingarten

Schmickler

Willenborg

et al. 2017

Journal of Laser Applications

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Mechanical polishing of glass is a time consuming process especially for lenses deviating from spherical surface such as aspheres. With laser polishing, the processing time can be significantly reduced and the wear of hard tooling can be avoided. Using laser radiation for polishing, a thin surface layer of the glass is heated up just below evaporation temperature due to the interaction of glass material and laser radiation. With increasing temperature, the reduced viscosity in the surface layer leads to the reduction of the roughness due to the surface tension. Hence, a contactless polishing method can be realized nearly without any loss of material or need of polishing agent. In this paper, results for laser polishing of fused silica, BK7, and S-TIH6 are presented with area rates up to 5 cm2/s. However, the results show that the achieved roughness with laser polishing is strongly influenced by the thermal properties of the type of glass. During laser polishing, the glass material is relocated at the surface, thus no shape errors can be corrected. To reduce the residual waviness and shape errors after laser polishing, the authors investigated a further laser-based process step (laser beam figuring, LBF) which ablates material for a shape correction. Ablation depths <5 nm allow a high precision laser ablation for selective processing. For both processes, a CO2 laser is used

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Section: State Of the Artmentioning

confidence: 99%

Laser polishing and laser shape correction of optical glass

Weingarten

Schmickler

Willenborg

et al. 2017

Journal of Laser Applications

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“…The larger research question of systematically studying SSD in ground SiC of different types and under different grinding conditions is undertaken in [9]. Research is also under way on how to effectively polish SiC surfaces by using laser polishing [10].…”

Section: Discussionmentioning

confidence: 99%

Subsurface Damage (SSD) Assessment in Ground Silicon Carbide (SiC)

Lambropoulos

Salzman

Smith

et al. 2017

Optical Design and Fabrication 2017 (Freeform, IODC, OFT)

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“…20 Thus, a fine surface can be attained by the certain overlapping rate and fluence of femtosecond laser, as reported in some studies on silicon. 21,22 The analysis above has sought to find out the inner relation under different overlapping rate of femtosecond laser polishing. In every region, there are obvious different mechanisms.…”

Section: Influence Of Femtosecond Laser Fluencementioning

confidence: 99%

Influence of energy fluence and overlapping rate of femtosecond laser on surface roughness of Ti-6Al-4V

et al. 2019

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The Ti-6Al-4V polished by femtosecond laser processing is first investigated. The surface nanoparticles of Ti-6Al-4V induced by femtosecond laser have been characterized by scanning electron microscopy and energy dispersive spectrometry, and the influence of laser fluence and the overlapping rate of laser beam on surface roughness have also been analyzed. Moreover, the relationship between the laser parameters and the surface roughness of Ti-6Al-4V has been revealed, and the fine surface roughness of Ti-6Al-4V is obtained based on the optimized femtosecond laser processing parameters.

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Optimization of femtosecond laser processing of silicon via numerical modeling

Cited by 41 publications

References 43 publications

Laser polishing and laser shape correction of optical glass

Laser polishing and laser shape correction of optical glass

Subsurface Damage (SSD) Assessment in Ground Silicon Carbide (SiC)

Influence of energy fluence and overlapping rate of femtosecond laser on surface roughness of Ti-6Al-4V

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