Optimization of light-surface plasmon coupling by periodicity regulation for a pyramidal probe

Kim, D.W.; Kim, Y.C.; Suwal, O. K.; Jha, V. K.; Park, M.J.; Choi, Seong Soo

doi:10.1016/j.mseb.2007.10.012

Cited by 22 publications

(17 citation statements)

References 9 publications

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“…The pyramidal oxide apex area has been etched using diluted hydrofluoric acid (HF) in order to open the aperture, followed by Al metal sputter deposition. The detailed microfabrication process will be elsewhere [10]. The width and the height of the inner side small pyramidal structure is ~ 2.75 and ~2 micro meter, respectively.…”

Section: Experimental Procedure: Far-field Measurementmentioning

confidence: 99%

Superfocusing the light through nanosize circular aperture

et al. 2010

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The macro size pyramidal horn probe such as klystron horn antenna has been used to provide the excellent focusing capabilities in microwave region. In the similar way, the pyramidal probe with the micron size mirror (pyramidal horn probe) has been fabricated with a nano-size aperture with diameter ranging from 30 to 330 nm on its apex. Light transmission through the micro-fabricated pyramidal horn probe has been measured to enhance the light transmission due to resonant effects between the cavity mode and the slit modes in the probe, along with directionality of the transmitted beam. The resonant tunneling between two standing waves in the input groove and in the output groove can provide the transmission enhancements. Below ~170 nm, the output power normalized to the input power (ratio) has been increased with decreasing diameter. On the other hand, for the diameter ranging from 330 to 170 nm, the ratio has been decreased with decreasing diameter. The transmission (T) is measured to be inversely proportional to the area (A), and TA value for input wavelength 532 nm is found to be constant, 0.136 for the diameter below 160 nm, and to be 0.053 for diameter greater than 160 nm.

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Section: Experimental Procedure: Far-field Measurementmentioning

confidence: 99%

Superfocusing the light through nanosize circular aperture

et al. 2010

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“…However, the nanopore with ≈10 nm diameter for an optical detection technique has yet to be fabricated. We previously reported fabrication of the nano‐aperture surrounded by the periodic patterns on pyramidal probes to improve the low transmittance of light through the nanosize aperture . We also have fabricated the nanopore with its diameter ranging from 10 to 3 nm inside the FIB drilled aperture by using various surface treatments including electron beam irradiations and ion beam irradiation.…”

Section: Introductionmentioning

confidence: 99%

Plasmonic Nanopore with Nanopattern and Nanoparticles for Single Molecule Analysis

Choi

Park

et al. 2017

Physica Status Solidi (a)

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In this report, the nano-hole on the electron beam induced membrane surrounded by periodic groove patterns are fabricated by focused ion beam technique (FIB), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). Initially, a %200 nm thick Au films was deposited on the microfabricated pyramid, or on the flat plate by using a sputter-deposition technique. Nano-pore formation inside the FIB drilled Au aperture was controlled down to a few nanometer by using electron beam irradiations. Periodic patterns would enhance the optical intensity through the nano-aperture. Au particles were formed on the membrane several months after electron beam irradiations. In addition, surface plasmonenhanced Raman spectroscopy measurements were performed and the greatest optical intensity from on the pyramidal aperture surrounded with the nanopattern was measured. Fabricated plasmonic pore-device can be utilized as a next generation optical sensor for single molecule analysis. TEM images of the fabricated nanopore surrounded by periodic patterns on the plate are presented with electron beam profile on the detector.

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“…4,5 Plasmonic optical effects can be obtained by patterning periodic grooves on the outside of the pyramid, and we have previously reported the effect of periodically patterned grooves upon the enhancement of the transmitted beam through an aperture on the pyramid. [6][7][8] The nanofocusing that exists at the aperture on a conical probe 9 and at the nanograting on a pyramidal tip 10 have been reported as a "plasmonic lens effect," where a conical plasmonic probe with a 100 nmdiameter aperture surrounded by a circular grating was found to provide better focusing with increased intensity at the apex area compared to that of a pyramidal probe without groove patterns. Also, a $100 nm-diameter focal spot with a tenfold increase in optical intensity at the apex of a conical probe has been obtained using a circular grating pattern to excite surface plasmon polaritons.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of pyramidal probes with various periodic patterns and a single nanopore

Choi

Park

Han

et al. 2015

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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The nanometer-scale patterned pyramidal probe with an electron beam-induced nanopore on the pyramid apex is an excellent candidate for an optical biosensor. The nanoapertures surrounded with various periodic groove patterns on the pyramid sides were fabricated using a focused ion beam technique, where the optical characteristics of the fabricated apertures with rectangular, circular, and elliptical groove patterns were investigated. The elliptical groove patterns on the pyramid were designed to maintain an identical distance between the grooves and the apex for the surface waves and, among the three patterns, the authors observed the highest optical transmission from the elliptically patterned pyramidal probe. A 103-fold increase of the transmitted optical intensity was observed after patterning with elliptical grooves, even without an aperture on the pyramid apex. The nanopore on the apex of the pyramid was fabricated using electron beam irradiation and was optically characterized.

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Optimization of light-surface plasmon coupling by periodicity regulation for a pyramidal probe

Cited by 22 publications

References 9 publications

Superfocusing the light through nanosize circular aperture

Superfocusing the light through nanosize circular aperture

Plasmonic Nanopore with Nanopattern and Nanoparticles for Single Molecule Analysis

Fabrication of pyramidal probes with various periodic patterns and a single nanopore

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