Optimization of Machine Learning Guided Optical Proximity Correction

Cho, Joonhyuk; Cho, Gangmin; Shin, Youngsoo

doi:10.1109/mwscas.2018.8623985

2018 IEEE 61st International Midwest Symposium on Circuits and Systems (MWSCAS) 2018

DOI: 10.1109/mwscas.2018.8623985

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Optimization of Machine Learning Guided Optical Proximity Correction

Joonhyuk Cho

Gangmin Cho

Youngsoo Shin

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A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

Huang,

Tung,

Feng

et al. 2024

IEEE Access

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Optimization of Machine Learning Guided Optical Proximity Correction

Cited by 4 publications

References 5 publications

A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

Machine Learning-Enhanced Model-Based Optical Proximity Correction by Using Convolutional Neural Network-Based Variable Threshold Method

Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review

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