2016
DOI: 10.15282/jmes.10.1.2016.13.0181
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Optimization of process parameter variations on leakage current in SOI vertical double gate MOSFET device

Abstract: This paper presents a study of optimizing input process parameters on leakage current (IOFF) in a silicon-on-insulator (SOI) Vertical Double-Gate (DG) Metal Oxide FieldEffect-Transistor (MOSFET) by using the L36 Taguchi method. The performance of the SOI Vertical DG-MOSFET device is evaluated in terms of its lowest leakage current (IOFF) value. An orthogonal array (OA), main effects, signal-to-noise ratio (SNR) and analysis of variance (ANOVA) are utilized in order to analyse the effect of input process parame… Show more

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Cited by 5 publications
(7 citation statements)
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“…The principal objective of an orthogonal array (OA) is to decrease the number of tests required to determine the design's most influential components. The experimental data will be analyzed using the signal-to-noise ratio (SNR) and analysis of variance (ANOVA) [23]. In this work, the PCE of the PSC device is classified based on its higher-quality features.…”
Section: Methodsmentioning
confidence: 99%
“…The principal objective of an orthogonal array (OA) is to decrease the number of tests required to determine the design's most influential components. The experimental data will be analyzed using the signal-to-noise ratio (SNR) and analysis of variance (ANOVA) [23]. In this work, the PCE of the PSC device is classified based on its higher-quality features.…”
Section: Methodsmentioning
confidence: 99%
“…The presence of Orthogonal Array (OA) is one of the major advantages of the Taguchi method. Taguchi method also helps in minimizing the number of experiments required in optimization purpose [6][7][8][9][10][11]. The important characteristics of HTL is high conductivity, high transparency, favorable process solution and stability, high WF and good hole mobility [12].…”
Section: Introductionmentioning
confidence: 99%
“…Hence, this study took the opportunity to manipulate the DOE approach in analysing the grafting efficiency as response studied and establishing the relationship between the independent and dependent variables [19][20][21][22][23][24]. In addition, this study also reporting on the utilization of quantitative IR based on FTIR spectral analysis for grafting efficiency determination.…”
Section: Introductionmentioning
confidence: 99%