Optimization of sensitivity and noise in piezoresistive cantilevers

Yu, Xiaomei; Thaysen, Jacob; Hansen, Ole; Boisen, Anja

doi:10.1063/1.1493660

Cited by 143 publications

(86 citation statements)

References 9 publications

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“…A deflection sensitivity of 2 · 10 À7 DR/R per Å was measured. This value is in agreement with data published earlier, especially for soft cantilevers [6,8].…”

Section: Resultssupporting

confidence: 83%

Scanning probe arrays for life sciences and nanobiology applications

Aeschimann

Meister

Akiyama

et al. 2006

Microelectronic Engineering

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Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments need usually to be performed under liquid conditions. The probe arrays have been fabricated by using silicon micromachining techniques and SOI wafers. For biological applications, when the cantilevers are immersed in electrically conductive buffer environments, the piezoresistive sensing elements have to be protected. For this purpose, the sensors were coated with a 50 nm thick silicon nitride film. The realized piezoresistive cantilevers had low spring constants between 0.1 and 0.5 N/m, well suited for biological applications. Parallel imaging using a 1 · 2 probe array was demonstrated by simultaneous imaging of a test sample in buffer solution.

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“…A deflection sensitivity of 2 · 10 À7 DR/R per Å was measured. This value is in agreement with data published earlier, especially for soft cantilevers [6,8].…”

Section: Resultssupporting

confidence: 83%

Scanning probe arrays for life sciences and nanobiology applications

Aeschimann

Meister

Akiyama

et al. 2006

Microelectronic Engineering

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“…[4][5][6][7] Measurement resolution generally improves as power dissipation increases 5 until the piezoresistor temperature becomes substantially greater than the ambient temperature, since increasing temperature corresponds to decreasing piezoresistive coefficient and increasing noise. 8,9 In general, published research on piezoresistive cantilever design has either ignored Joule heating or set a power budget that is decoupled from cantilever design.…”

mentioning

confidence: 99%

Self-heating in piezoresistive cantilevers

Doll

Corbin

King

et al. 2011

Applied Physics Letters

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We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

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“…In piezoresisitive sensing, the dominating noise source is in most cases electronic noise from the bridge resistors, in particular at low frequencies where 1/f noise dominates [5]. The noise voltage has a fixed dependence on the excitation voltage, ex V , for a given resistor layout.…”

Section: Introductionmentioning

confidence: 99%

Bridge configurations in piezoresistive two-axis accelerometers

Halvorsen

Husa

2009

Analog Integr Circ Sig Process

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In piezoresisitive two-axis accelerometers with two proof masses suspended by cantilever beams, there are generally many ways to configure the Wheatstone bridges. The configurations are different both with respect to functionality and performance. The main distinction is between bridges that contain resistors belonging to both proof masses, and the one bridge that doesn't.We compare the different bridge configurations by analytical calculations of bridge non-linearity, robustness towards manufacturing variations and electronic noise. We consider accelerometers where the ratio between the sensitivity to acceleration normal and parallel to the chip plane vary over a wide range. For numerical examples we use representative values for p-type silicon.The performance of the configuration with one bridge connected to each proof mass is superior to those that combine resistors belonging to different proof masses.

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Optimization of sensitivity and noise in piezoresistive cantilevers

Cited by 143 publications

References 9 publications

Scanning probe arrays for life sciences and nanobiology applications

Scanning probe arrays for life sciences and nanobiology applications

Self-heating in piezoresistive cantilevers

Bridge configurations in piezoresistive two-axis accelerometers

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