Self-heating in piezoresistive cantilevers

Doll, Joseph C.; Corbin, Elise A.; King, William P.; Pruitt, Beth L.

doi:10.1063/1.3595485

Cited by 20 publications

(18 citation statements)

References 21 publications

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“…(b) The corresponding temperature increase is calculated from the calibrated piezoresistor TCR. The average piezoresistor temperature predicted by a finite difference-based thermal model [12] (dashed lines) matches the experimental data to within about 20%. (c) The validated model is used to predict the maximum and tip temperatures during operation at a 1 V bridge bias.…”

Section: Figurementioning

confidence: 77%

“…We opted for a cantilever beam thickness of 300 nm because the reduction in thermal conductivity [9] and uncertainty in the effective elastic modulus [10, 11] of thinner probes lead to diminishing performance returns for piezoresistive cantilevers [12]. …”

Section: Designmentioning

confidence: 99%

“…We have written extensively about piezoresistive cantilever design and optimization [19, 20, 21, 22, 12]. The cantilever design is chosen to minimize the RMS force noise, equal to the minimum detectable force (MDF), in the intended measurement bandwidth.…”

Section: Designmentioning

confidence: 99%

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High-bandwidth piezoresistive force probes with integrated thermal actuation

Doll

Pruitt

2012

J. Micromech. Microeng.

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We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond time scale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN/nm) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using open source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20 fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness.

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Section: Figurementioning

confidence: 77%

Section: Designmentioning

confidence: 99%

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High-bandwidth piezoresistive force probes with integrated thermal actuation

Doll

Pruitt

2012

J. Micromech. Microeng.

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“…For a complete review of the main papers published on this topic, the reader is referred to (Khanafer and Vafai 2010) where it can be observed that the coupling of thermal-fluid-solid interactions is a challenging task that has not yet been accurately solved. A common practice is the imposing of a constant temperature at the fluid-solid interface Doll et al 2011), or a constant heat transfer coefficient to investigate the temperature distribution in the solid domain (Mohd and Ansari 2012). This paper proposes a simple methodology to solve the thermal FSI problems in heated micro-cantilevers based on the standard two-way coupling approach: the fluid package solves the Navier-Stokes equations and obtains the fluid force and the heat flux over the solid boundary.…”

Section: List Of Symbolsmentioning

confidence: 99%

A simple numerical methodology for thermal-fluid-structural interactions of air damping over heated micro-cantilevers

Miana

Bernal

Paniagua

et al. 2012

Microfluid Nanofluid

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This paper proposes a simple methodology to analyse numerically the effects of air damping on the oscillatory motion of heated micro-cantilevers. The proposed methodology is fully solved by the fluid solver, because the solid domain is embedded into a subroutine executed at the end of each time step. The methodology is first validated against numerical and experimental data yielding acceptable results. Next, it is applied to predict the quality factor of a micro-cantilever heated by an electric resistance inserted inside it. The transferred heat flow and the evolution in time of temperature are analysed and the quality factors of both heated and isothermal micro-cantilevers are compared.

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“…Treatise encompasses a few examples where researchers have investigated the thermal drift in piezoresistive cantilever sensors through theoretical modeling [17][18][19] and experimental studies. [20][21][22][23][24][25] Theoretical studies have primarily focused on the impact of the piezoresistor dimensions and the external voltage supply on the thermal drift. Moreover, reported mathematical models have not only neglected the influence of cantilever dimensions and the constituent layers but also overlooked the interdependence of electrical, mechanical and thermal design parameters in determining the performance of the sensors.…”

Section: Introductionmentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

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Self-heating in piezoresistive cantilevers

Cited by 20 publications

References 21 publications

High-bandwidth piezoresistive force probes with integrated thermal actuation

High-bandwidth piezoresistive force probes with integrated thermal actuation

A simple numerical methodology for thermal-fluid-structural interactions of air damping over heated micro-cantilevers

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

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