2017
DOI: 10.1016/j.ultramic.2016.12.021
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Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

Abstract: Scanning nanobeam electron diffraction strain mapping is a technique by which the positions of diffracted disks sampled at the nanoscale over a crystalline sample can be used to reconstruct a strain map over a large area. However, it is important that the disk positions are measured accurately, as their positions relative to a reference are directly used to calculate strain. In this study, we compare several correlation methods using both simulated and experimental data in order to directly probe susceptibilit… Show more

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Cited by 88 publications
(83 citation statements)
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“…This precision is not sufficient for several potential applications of 4D-STEM strain mapping, such as temperature mapping by thermal expansion measurement or mapping certain structural transformations via the lattice parameters, where strains may be on the order of 10 −4 . We note that direct comparison between precision limits reported in the literature is difficult because the precision limit depends on the sample properties, microscope image distortions, and the electron dose [20,26,27].…”
Section: Introductionmentioning
confidence: 95%
See 1 more Smart Citation
“…This precision is not sufficient for several potential applications of 4D-STEM strain mapping, such as temperature mapping by thermal expansion measurement or mapping certain structural transformations via the lattice parameters, where strains may be on the order of 10 −4 . We note that direct comparison between precision limits reported in the literature is difficult because the precision limit depends on the sample properties, microscope image distortions, and the electron dose [20,26,27].…”
Section: Introductionmentioning
confidence: 95%
“…The crosscorrelation is given when p = 0, and phase correlation is defined by p = 1. Values of p between 0 and 1 define a hybrid image correlation [20].…”
Section: Measuring Disk Positionsmentioning
confidence: 99%
“…High-pass filtering was performed prior to this step to remove the internal structure of diffraction disks. A pure cross-correlation method with filtering was optimal due to the thickness of the sample [24]. A peak-fitting algorithm was used on the original diffraction pattern to refine the initial peak position determined from the crosscorrelation routine.…”
Section: Nanoprobe Diffraction Analysis Algorithmmentioning
confidence: 99%
“…4D-STEM can deliver much more structural information [1,2] than conventional STEM where only integrated electron intensities are acquired. The 4D dataset of CBED patterns can be utilized for structural analysis such as ptychographic reconstruction [3][4][5][6][7][8][9], strain mapping [10][11][12], electric and magnetic fields imaging using differential phase contrast [13,14], and composition and thickness measurements [15] with position-averaged CBED (PACBED) [16].…”
Section: Introductionmentioning
confidence: 99%