2012 SEMI Advanced Semiconductor Manufacturing Conference 2012
DOI: 10.1109/asmc.2012.6212861
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Optimizing product yield using manufacturing defect weights

Abstract: Yield of 45nm products can be optimized by adjusting how the router is run. While forcing wiring to upper levels adds wire length and increases the number of vias, sensitivity to random defects is reduced. Wire spreading does not improve yield for 45nm products.

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Cited by 4 publications
(1 citation statement)
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“…Weight, as used in this context, can be considered to be a product of the criticality of a component or geometric feature and the risk in a given geometric context. Indeed, computations of this type are applied in various risk assessment schemes such as Failure Mode and Effect Analysis (FMEA) [15], [16]. As such, both the criticality and risk values are empirically determined and assigned by the foundry.…”
Section: B Interconnect Costmentioning
confidence: 99%
“…Weight, as used in this context, can be considered to be a product of the criticality of a component or geometric feature and the risk in a given geometric context. Indeed, computations of this type are applied in various risk assessment schemes such as Failure Mode and Effect Analysis (FMEA) [15], [16]. As such, both the criticality and risk values are empirically determined and assigned by the foundry.…”
Section: B Interconnect Costmentioning
confidence: 99%