Optimum reaction conditions for lead zirconate titanate thick film deposition by ultrasound-assisted hydrothermal method

Abstract

A hydrothermal method can be used to deposit lead zirconate titanate (PZT) films and has several advantages, such as a relatively low reaction temperature and high crystal quality. We developed an ultrasound-assisted hydrothermal method to promote the hydrothermal reactions, which is effective for thick-PZT-film deposition. The first ultrasound-assisted hydrothermal method we developed can synthesize a 7.5 µm PZT film on a titanium substrate. However, for a much thicker film, repeated depositions were required, and the optimum precursor solution for the first deposition was not suitable for repeated depositions. In this study, we attempted to find the optimum precursor solution for depositing a film of sufficient thickness by repeated depositions. As a result, we were able to synthesize a 23.6 µm PZT film on second deposition by changing the ratio of zirconium to titanium ions in the precursor solutions. In addition, a transverse effect transducer was fabricated under optimum conditions and its vibration properties were evaluated.

Thermal stability of self-polarization in a (K,Na)NbO3 film prepared by the hydrothermal method

“…Self-polarization behavior was also reported for Pb(Zr,Ti)O 3 and (Bi,Na)TiO 3 -(Bi,K)TiO 3 films prepared by hydrothermal synthesis, indicating that the self-polarization behavior is typical of hydrothermally synthesized films. [31][32][33][34][35] Self-polarization means that the polarization of the film is aligned to one direction without any poling treatment. To realize this situation, the external force that the polarization direction makes align one direction is essential during the film deposition process.…”

Double-parabolic-reflectors acoustic waveguides for high-power medical ultrasound

“…As for potential applications, in addition to minimally invasive ultrasound therapeutics, our waveguide can also be utilized for ultrasound imaging of large tissue (liver, etc. ), ultrasound microscope 28 , cavitation for chemical reaction 43–45 , acoustic tweezer for cell manipulation 46 , drug delivery 4,47 , gene therapy 47 , etc. In conclusion, in this fundamental work, we introduced new features to our waveguide that are not possible for conventional transducers.…”

Piezoelectric Nanogenerators Derived Self‐Powered Sensors for Multifunctional Applications and Artificial Intelligence

“…The hydrothermal and sol-gel methods are commonly used to synthesize typical inorganic piezoelectric materials of PZT and ZnO. [89][90][91][92][93][94] The sol-gel method shows advantages in precision control and economical, while the hydrothermal method has the minimum synthesis temperature (≤200 °C), [95] which are both effective to fabricate PZT thick films. Instead of conventional hydrothermal equipment (a large-scale autoclave with integrated stirring equipment), Wang et al used an innovative and economical hydrothermal method based on oil-bath to successfully synthesize the PZT thick films (10 µm) with good piezoelectricity (Figure 5a).…”