Sensors 1991
DOI: 10.1002/9783527620135.ch12
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Optochemical Sensors

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Cited by 11 publications
(3 citation statements)
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“…The conductometric sensors have relatively low sensitivity compared to amperometric sensors. 2) Fabry-Pérot-Based Microspectrometer (FPI): This device consists of two partially reflecting, low-loss, and parallel mirrors separated by a gap [17]. If this gap is equal to multiples of half a wavelength of the incident light then a series of sharp resonant transmission peaks due to multiple reflections of the light in the cavity occurring through the mirrors.…”
Section: Applications Of Fet Sensors Include Detection Of Ammonia Ammentioning
confidence: 99%
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“…The conductometric sensors have relatively low sensitivity compared to amperometric sensors. 2) Fabry-Pérot-Based Microspectrometer (FPI): This device consists of two partially reflecting, low-loss, and parallel mirrors separated by a gap [17]. If this gap is equal to multiples of half a wavelength of the incident light then a series of sharp resonant transmission peaks due to multiple reflections of the light in the cavity occurring through the mirrors.…”
Section: Applications Of Fet Sensors Include Detection Of Ammonia Ammentioning
confidence: 99%
“…Fabrication steps include wafer fusion bonding then etching is done to achieve movable mesa, again etching is performed to achieve the gap and control electrode spacing, and finally to multilayer dielectric mirror layers and control electrodes have to be deposited [17]. Applications include gas sensors to monitor carbon monoxide and hydrocarbons.…”
Section: Applications Of Fet Sensors Include Detection Of Ammonia Ammentioning
confidence: 99%
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