2011
DOI: 10.1364/oe.19.019708
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Optomechanical trampoline resonators

Abstract: We report on the development of optomechanical "trampoline" resonators composed of a tiny SiO(2)/Ta(2)O(5) dielectric mirror on a silicon nitride micro-resonator. We observe optical finesses of up to 4 × 10(4) and mechanical quality factors as high as 9 × 10(5) in relatively massive (~100 ng) and low frequency (10-200 kHz) devices. This results in a photon-phonon coupling efficiency considerably higher than previous Fabry-Perot-type optomechanical systems. These devices are well suited to ultra-sensitive force… Show more

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Cited by 80 publications
(71 citation statements)
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“…Focusing our interest to FabryPerot interferometers with oscillating mirrors, we mention that very low mass oscillators have recently been conceived and tested, based on free-standing dielectric multi-layer reflectors [3,35,36], or on tiny mirrors on shaped thin membranes [6,7,37,38].…”
Section: Introductionmentioning
confidence: 99%
“…Focusing our interest to FabryPerot interferometers with oscillating mirrors, we mention that very low mass oscillators have recently been conceived and tested, based on free-standing dielectric multi-layer reflectors [3,35,36], or on tiny mirrors on shaped thin membranes [6,7,37,38].…”
Section: Introductionmentioning
confidence: 99%
“…An additional challenge is to operate at mechanical frequencies beyond 10 5 Hz, where commercial lasers exhibit a minimal amount of classical noise and can relatively easily be quantum limited to shot noise in order to avoid heating or decoherence of the mechanics through noise [23]. Another difficulty for realistic quantum optomechanics experiments at room temperature is that often good mechanical quality is mutually exclusive with good optical reflectivity [24][25][26]. This limits the achievable coupling rates and increases the necessary optical power to a level where absorption potentially becomes a practical limitation for cooling and quantum experiments.…”
mentioning
confidence: 99%
“…As for optical microsystems, several groups have indeed explored designs of micromirrors oscillating in the range of frequencies we are considering [37][38][39][40]. In all cases, it is evident that it is very difficult to satisfy, at the same time, all the technological requirements necessary for the observation of quantum effects.…”
Section: Design Rationalementioning
confidence: 99%