Order improvement of surface nanopatterns via substrate rocking under ion bombardment: Experiments and nonlinear models

Jo, Sujin; Jun, Jihee; Lee, Eunsu; Yoon, Soon‐Gil; Seo, Jae M.; Muñoz-García, Javier; Cuerno, Rodolfo; Kim, J.-S.

doi:10.1103/physrevb.102.045421

Cited by 11 publications

(12 citation statements)

References 42 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The conserved Kuramoto-Sivashinsky (CKS) nonlinearity produces ripple coarsening [55,56], a phenomenon that is frequently observed in experiments [5,57]. This term is also needed if the pattern formation that occurs on a silicon target that is rocked during ion bombardment is to be reproduced [58]. Although the effect of the CKS term is negligible near the threshold angle for pattern formation [54], the angle of incidence Θ in the case of figure 2(a) was 74 • and so was significantly larger than Θ th ∼ 55 • .…”

Section: Comparison With Theoretical Modelsmentioning

confidence: 99%

Nanoscale pattern formation on silicon surfaces bombarded with a krypton ion beam: experiments and simulations

Seo

Pearson

Bradley

et al. 2022

J. Phys.: Condens. Matter

Self Cite

View full text Add to dashboard Cite

The nanoscale patterns produced by bombardment of the (100) surface of silicon with a 2 keV Kr ion beam are investigated both experimentally and theoretically. In our experiments, we ﬁnd that the patterns observed at high ion ﬂuences depend sensitively on the angle of incidence Θ. For Θ values between 74◦ and 85◦, we observe ﬁve decidedly different kinds of morphologies, including triangular nanostructures traversed by parallel-mode ripples, long parallel ridges decorated by short-wavelength ripples, and a remarkable mesh-like morphology. In contrast, only parallel-mode ripples are present for low ion ﬂuences except for Θ = 85◦. Our simulations show that triangular nanostructures that closely resemble those in our experiments emerge if a linearly dispersive term and a conserved Kuramoto-Sivashinsky nonlinearity are appended to the usual equation of motion. We ﬁnd ridges traversed by ripples, on the other hand, in simulations of the Harrison-Pearson-Bradley equation [M. P. Harrison, D. A. Pearson, and R. M. Bradley, Phys. Rev. E 96, 032804 (2017)]. For Θ = 85◦, the solid surface is apparently stable and simulations of an anisotropic Edwards-Wilkinson equation yield surfaces similar to those seen in our experiments. Explaining the other two kinds of patterns we ﬁnd in our experiments remains a challenge for future theoretical work.

show abstract

Section: Comparison With Theoretical Modelsmentioning

confidence: 99%

Nanoscale pattern formation on silicon surfaces bombarded with a krypton ion beam: experiments and simulations

Seo

Pearson

Bradley

et al. 2022

J. Phys.: Condens. Matter

Self Cite

View full text Add to dashboard Cite

show abstract

“…The lateral landscape remained randomly rough. On the other hand, it is well known that ordered nano-patterns can grow when surfaces of different crystalline or amorphous materials are irradiated by ions with relatively high energies of several or tens keV [104][105][106][107][108][109]. This surface instability has already been practically used [104,[110][111][112] but is still not fully understood theoretically.…”

Section: Discussion Of the Resultsmentioning

confidence: 99%

Effect of trampoline sputtering on surface morphology and coatings properties

Gabovich¹,

Semeniuk²,

Semeniuk³

2021

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

The collective trampoline ion-plasma effect was used to modify surface properties of metals, ceramics, silicon and carbon in a desired manner. The rough surfaces created by low-energy dense ion flows were demonstrated to include double-level hierarchical structures. Namely, the submicron and nanoscale peaks and valleys were found. The coating films were deposited by the nanoclusters emitted in the trampoline mode, as well as by plasma-enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD) methods. The substrates were prepared by prior ion processing in the trampoline mode. Preliminary nanoscale texturing of surfaces substantially modified the interaction of ion-plasma flows with surfaces during the subsequent film formation by PVD and PECVD techniques. The so created rough surface showed the strong film adhesion and a 25%–50% faster film formation during ion-plasma deposition as compared to the case of a non-textured surface. The transfer of target material in the form of nanoclusters allowed obtaining dense defect-free micron-scale films. The submicron structure leads to the infrared and visible light trapping. The results were analyzed on the basis of the previously suggested qualitative model of the trampoline sputtering.

show abstract

“…Thus, only a relatively narrow window of fluences is useful to improve the pattern ordering. Accordingly, specific experimental configurations have been devised to improve this ordering, like the sequential ion-beam sputtering method [226], or target rocking [227,228]. Following this strategy, unconventional formats for IBI patterning have been developed in order to increase the pattern ordering [229].…”

Section: Pattern Orderingmentioning

confidence: 99%

Surface nanopatterning by ion beam irradiation: compositional effects

Vazquez

Redondo-Cubero

Lorenz

et al. 2022

J. Phys.: Condens. Matter

Self Cite

View full text Add to dashboard Cite

Surface nanopatterning induced by ion beam irradiation (IBI) has emerged as an effective nanostructuring technique since it induces patterns on large areas of a wide variety of materials, in short time, and at low cost. Nowadays, two main subfields can be distinguished within IBI nanopatterning depending on the irrelevant or relevant role played by the surface composition. In this review, we give an up-dated account of the progress reached when surface composition plays a relevant role, with a main focus on IBI surface patterning with simultaneous co-deposition of foreign atoms. In addition, we also review the advances in IBI of compound surfaces as well as IBI systems where the ion employed is not a noble gas species. In particular, for the IBI with concurrent metal co-deposition, we detail the chronological evolution of these studies because it helps us to clarify some contradictory early reports. We describe the main patterns obtained with this technique as a function of the foreign atom deposition pathway, also focusing in those systematic studies that have contributed to identify the main mechanisms leading to the surface pattern formation and development. Likewise, we explain the main theoretical models aimed at describing these nanopattern formation processes. Finally, we address two main special features of the patterns induced by this technique, namely, the enhanced pattern ordering and the possibility to produce both morphological and chemical patterns.

show abstract

Order improvement of surface nanopatterns via substrate rocking under ion bombardment: Experiments and nonlinear models

Cited by 11 publications

References 42 publications

Nanoscale pattern formation on silicon surfaces bombarded with a krypton ion beam: experiments and simulations

Nanoscale pattern formation on silicon surfaces bombarded with a krypton ion beam: experiments and simulations

Effect of trampoline sputtering on surface morphology and coatings properties

Surface nanopatterning by ion beam irradiation: compositional effects

Contact Info

Product

Resources

About