Order quantification of hexagonal periodic arrays fabricated by<i>in situ</i>solvent-assisted nanoimprint lithography of block copolymers

Simão, Cláudia; Khunsin, Worawut; Kehagias, N.; Zelsmann, M.; Morris, Michael A.; Torres, C. M. Sotomayor

doi:10.1088/0957-4484/25/17/175703

Cited by 21 publications

(18 citation statements)

References 58 publications

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“…Similar degrees of imperfection were experimentally found and predicted by three-dimensional cell dynamics simulations [38]. Long-range ordering with non-defective hexagonal lattice has been demonstrated to be improved by controlled solvent annealing [39], solvent-assisted nanoimprint lithography [40], chemical patterning [38] or topographical constrains [41]. A high degree of long-range order is rigorously required for certain nanotechnology applications such as the fabrication of photonic or plasmonic waveguides, while shorter-range order is generally accepted for biomedical applications involving the generation of biomolecular nanopatterns [42].…”

Section: Resultssupporting

confidence: 55%

Large-Area Biomolecule Nanopatterns on Diblock Copolymer Surfaces for Cell Adhesion Studies

et al. 2019

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Cell membrane receptors bind to extracellular ligands, triggering intracellular signal transduction pathways that result in specific cell function. Some receptors require to be associated forming clusters for effective signaling. Increasing evidences suggest that receptor clustering is subjected to spatially controlled ligand distribution at the nanoscale. Herein we present a method to produce in an easy, straightforward process, nanopatterns of biomolecular ligands to study ligand–receptor processes involving multivalent interactions. We based our platform in self-assembled diblock copolymers composed of poly(styrene) (PS) and poly(methyl methacrylate) (PMMA) that form PMMA nanodomains in a closed-packed hexagonal arrangement. Upon PMMA selective functionalization, biomolecular nanopatterns over large areas are produced. Nanopattern size and spacing can be controlled by the composition of the block-copolymer selected. Nanopatterns of cell adhesive peptides of different size and spacing were produced, and their impact in integrin receptor clustering and the formation of cell focal adhesions was studied. Cells on ligand nanopatterns showed an increased number of focal contacts, which were, in turn, more matured than those found in cells cultured on randomly presenting ligands. These findings suggest that our methodology is a suitable, versatile tool to study and control receptor clustering signaling and downstream cell behavior through a surface-based ligand patterning technique.

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Section: Resultssupporting

confidence: 55%

Large-Area Biomolecule Nanopatterns on Diblock Copolymer Surfaces for Cell Adhesion Studies

et al. 2019

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“…14 Figure 1b, it was possible to measure the critical dimensions of the PEO cylinders: diameter around 20 nm with a periodicity of approximately 40 nm, consistent with reported previous works. 5 After annealing in a saturated atmosphere of chloroform, the PEO cylinders started flipped the orientation towards parallel to substrate, resulting in line patterns. The cyclical flipping behaviour has been reported in this BCP system, but with toluene as annealing solvent.…”

Section: Resultsmentioning

confidence: 99%

“…[1][2][3] At the sub-20 nm scale nanostructures, fabrication costs have triggered the search of alternative fabrication techniques. One of the most promising technologies is directed self-assembly of block copolymers, [4][5] which are valuable systems to create hexagonal and linear patterns on surface, only by tuning substrate surfaces properties. [6][7][8] This self-assembly type technology can result in characteristic fingerprint patterns to highly controllably aligned lines patterns on surface using state-of-the-art directed self-assembly (DSA) techniques.…”

Section: Introductionmentioning

confidence: 99%

Order and defectivity nanometrology by image processing and analysis of sub-20 nm BCPs features for lithographic applications

et al. 2014

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The line patterns obtained by the self-assembly of the block copolymer (BCP) polystyrene-b-polyethylene oxide (PS-b-PEO) was investigated. The hexagonal PS-b-PEO 42k-11.5k in a thin film was solvent annealed in a chlorophorm saturated atmosphere for three different annealing times. The microphase segregation of this BCP returned 18nm cylinders of PEO through the PS matrix, with an approximately 40 n periodicity, as expected. Under chlorophorm vapours, the PEO cylinders oriented perpendicular to the silicon substrate while increasing the annealing time. These cylinders formed linear patterns with different alignment. To achieve insights about the percentage of alignment, defect type pareto and density, and order quantification to compare the three annealing recipes, the samples were analysed with innovative image analysis software specifically developed in our laboratory to identify elements and defects of line arrays from block copolymer self-assembly. From this technique, it was extracted dimensional metrology estimating pitch size and placement error, and the linewidth of the lines was estimated. Secondly, the methodology allows identification and quantification of typical defects observable in BCP systems, such as turning points, disclination or branching points, break or lone points and end points. The defect density and the quantification of the alignment were estimated using our technique. The methodology presented here represents a step forward in dimensional metrology and defect analysis of BCP DSA systems and can be readily used to analyze other lithographic or non-lithographic patterns.

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“…Self‐assembled BCPs form a periodic or quasi‐periodic array of pores, which can then be transferred to silicon (Figure f). Free‐standing porous membranes with thickness of 100 nm and features with neck size down to 16 nm have been reported, even though the long‐range order of the BCP self‐assembly remains a challenge …”

Section: Fabrication Techniquesmentioning

confidence: 99%

2D Phononic Crystals: Progress and Prospects in Hypersound and Thermal Transport Engineering

Sledzinska

Graczykowski

Maire

et al. 2019

Adv Funct Materials

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The central concept in phononics is the tuning of the phonon dispersion relation, or phonon engineering, which provides a means of controlling related properties such as group velocity or phonon interactions and, therefore, phonon propagation, in a wide range of frequencies depending on the geometries and sizes of the materials. Phononics exploits the present state of the art in nanofabrication to tailor dispersion relations in the range of GHz for the control of elastic waves/phonons propagation with applications toward new information technology concepts with phonons as state variable. Moreover, phonons provide an adaptable approach for supporting a coherent coupling between different state variables, and the development of nanoscale optomechanical systems during the last decade attests this prospect. The most extended approach to manipulate the phonon dispersion relation is introducing an artificial periodic modulation of the elastic properties, which is referred to as phononic crystal (PnC). Herein, the focus is on the recent experimental achievements in the fabrication and application of 2D PnCs enabling the modification of the dispersion relation of surface and membrane modes, and presenting phononic bandgaps, waveguiding, and confinement in the hypersonic regime. Furthermore, these artificial materials offer the potential of modifying and controlling the heat flow to enable new schemes in thermal management.

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Order quantification of hexagonal periodic arrays fabricated byin situsolvent-assisted nanoimprint lithography of block copolymers

Abstract: Directed self-assembly of block copolymer polystyrene-b-polyethylene oxide (PS-b-PEO) thin film was achieved by one-pot methodology of solvent vapor assisted nanoimprint lithography

Cited by 21 publications

References 58 publications

Large-Area Biomolecule Nanopatterns on Diblock Copolymer Surfaces for Cell Adhesion Studies

Large-Area Biomolecule Nanopatterns on Diblock Copolymer Surfaces for Cell Adhesion Studies

Order and defectivity nanometrology by image processing and analysis of sub-20 nm BCPs features for lithographic applications

2D Phononic Crystals: Progress and Prospects in Hypersound and Thermal Transport Engineering

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