“…Lithography is a crucial process for manufacturing electronic devices. Various lithographic processes, such as photolithography, [1,2] e-beam lithography, [3] and direct writing, [4] can form defined patterns on which the charge transport behavior is modulated according to the device applications, including field-effect transistors, [5,6] diodes, [7,8] photodetectors, [9,10] gas sensors, [11][12][13] and memory devices. [14,15] Tremendous effort has been made in lithography techniques to shrink and shorten pattern lengths since short-channel devices offer a lower power consumption and higher driving current.…”