The Proceedings of the Materials and Mechanics Conference
 2012
DOI: 10.1299/jsmemm.2012._os1908-1_
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OS1908 Stress Measurement for Silicon Oxide Film using Cathodoluminescence Spectroscopy : Investigation of electron irradiation damage

Nobutaka Goami
1
,
Takahiro Namazu2,
Naoaki Yamashita3
et al.
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