Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows

Awafer-level, heterogeneously integrated, high flow SMA-silicon gas microvalve

“…This work addresses this shortcoming by developing high-performance, large flow control valves with a small footprint area that can be manufactured batchwise and therefore at potentially lower cost. There are two main designs for gas microvalves [2]. One is the diaphragm or seat valve design ( Fig.…”

“…Gate valves regulate the flow by a gate moving perpendicular to the flow ( Fig. 1(b)) [2,6,7]. This type of design allows for gas flow control orders of magnitude larger than seat valves, but has the inherent limitation of considerable leakage flow in the closed state.…”

“…However, the latter is acceptable in specific applications in the automation industry e.g. in IP converters [2]. Three fundamental gate valve configurations can be distinguished [2].…”

“…in IP converters [2]. Three fundamental gate valve configurations can be distinguished [2]. Designs with in-plane flow and out-ofplane gate actuation are the most promising for reducing the valve footprint area, because no footprint area needs to be reserved for the gate movement.…”

“…All of the previous reported out-of-plane actuated gate microvalves featured external actuation. Attempts with integrated thermal bimorph actuators failed since the actuators were not strong enough to withstand vibration and forces caused by the high flow or pressure of the gas medium [2]. For gas microvalve applications, a strong and robust actuator solution is therefore needed.…”