Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating

Clausi, Donato; Gradin, Henrik; Braun, Stefan; Peirs, Jan; Stemme, G.; Reynaerts, Dominiek; Wijngaart, Wouter van der

doi:10.1016/j.sna.2012.08.036

Cited by 12 publications

(13 citation statements)

References 15 publications

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“…Clausi et al [34] realized a robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating. The integration method provides both high bond strength and electrical connections in one processing step, and it allows mass production of microactuators having high work density.…”

Section: State Of the Art On Systemsmentioning

confidence: 99%

Review on Shape Memory Materials

Mor

2016

MATEC Web of Conferences

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Section: State Of the Art On Systemsmentioning

confidence: 99%

Review on Shape Memory Materials

Mor

2016

MATEC Web of Conferences

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“…This robotic jellyfish could provide an artificial alternative for the study of jellyfish and allows engineers and scientists to analyze parameters that cannot be analyzed using the actual animal. Clausi et al [103] reported an SMA wires-on-silicon microactuator ( Figure 9). The actuator consists of fixed and moveable silicon anchors that are mechanically connected to two SMA wires to form a current loop and silicon cantilevers, which serve as the bias mechanism for reversible motion.…”

Section: W E E T T T T T R W E T W E T W W E E T T T T T Tmentioning

confidence: 99%

Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

2015

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Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing micro-scale devices using this material. This paper gives an overview of the fabrication and manufacturing technique of thin-film and bulk micromachined SMAs. Key features such as material properties, transformation temperature, material composition, and actuation method are also presented. The application and micromechanism for both thin-film and bulk SMA are described. Finally, the microactuator devices emphasized for biomedical applications such as microgrippers and micropumps are highlighted. The presented review will provide information for researchers who are actively working on the development of SMA-based microscale biomedical devices.

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“…The application of SMA actuators offers some advantages, proved by several studies and patents [32][33][34][35], ranging from the industrial [36], to the medical-surgery [37], the aerospace [38], and the automotive [39], fields. The compactness and the high energy density favor lighter and solid design solutions for instance compliant with the typical aerospace weight and maintenance requirements [40].…”

Section: Introductionmentioning

confidence: 99%

SMA-Based System for Environmental Sensors Released from an Unmanned Aerial Vehicle

et al. 2017

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Abstract:In the work at hand, a shape memory alloy (SMA)-based system is presented. The system, conceived for releasing environmental sensors from ground or small unmanned aerial vehicles, UAV (often named UAS, unmanned aerial system), is made of a door, integrated into the bottom of the fuselage, a device distributor, operated by a couple of antagonistic SMA springs, and a kinematic chain, to synchronize the deployment operation with the system movement. On the basis of the specifications (weight, available space, energy supply, sensors size, etc.), the system design was addressed. After having identified the main system characteristics, a representative mock-up was manufactured, featuring the bottom part of the reference fuselage. Functionality tests were performed to prove the system capability to release the sensors; a detailed characterization was finally carried out, mainly finalized at correlating the kinematic chain displacement with the SMA spring temperature and the supplied electrical power. A comparison between theoretical predictions and experimental outcomes showed good agreement.

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Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating

Cited by 12 publications

References 15 publications

Review on Shape Memory Materials

Review on Shape Memory Materials

Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

SMA-Based System for Environmental Sensors Released from an Unmanned Aerial Vehicle

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