1998
DOI: 10.1063/1.368885
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Outdiffusion of the excess carbon in SiC films into Si substrate during film growth

Abstract: Articles you may be interested inGrowth dynamics and characterization of SiC quantum dots synthesized by low-frequency inductively coupled plasma assisted rf magnetron sputtering Growth of single crystalline GaN thin films on Si(111) substrates by high vacuum metalorganic chemical vapor deposition using a single molecular precursor

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Cited by 58 publications
(22 citation statements)
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“…The peak located at 558.74 cm À1 corresponds to phone mode of hexagonal GaN crystal, which is similar to the results of Li [6]; the peak at 608.12 cm À1 is associated with the vibration absorption of substituted carbon in the silicon lattice [17] and the peak at 1093 cm À1 corresponds to the Si-O-Si asymmetric stretching vibration absorption due to the oxidation of the silicon substrate [18]. No Ga-O bond is shown in Figure 3; it can be seen that under this condition Ga 2 O 3 reacted with NH 3 completely to generate hexagonal GaN crystal.…”
Section: Microstructure and Components Analysissupporting
confidence: 83%
“…The peak located at 558.74 cm À1 corresponds to phone mode of hexagonal GaN crystal, which is similar to the results of Li [6]; the peak at 608.12 cm À1 is associated with the vibration absorption of substituted carbon in the silicon lattice [17] and the peak at 1093 cm À1 corresponds to the Si-O-Si asymmetric stretching vibration absorption due to the oxidation of the silicon substrate [18]. No Ga-O bond is shown in Figure 3; it can be seen that under this condition Ga 2 O 3 reacted with NH 3 completely to generate hexagonal GaN crystal.…”
Section: Microstructure and Components Analysissupporting
confidence: 83%
“…[14] There is no Ga-O bond and other absorption band in the spectrum; [15] therefore, Ga 2 O 3 films react with NH 3 completely at 1223 K (950°C) for 15 minutes and form hexagonal type GaN crystal, which is the same as the results of the XRD. The Ga-N bond intensity of the sample whose ammoniating time is 20 minutes is stronger than those of the other two samples, which proves the sample has the highest crystalline quality and is also the same as the results of the XRD.…”
Section: Resultsmentioning
confidence: 52%
“…The band at 1,040-1,120 cm -1 correlates to the Si-O-Si asymmetric stretching vibration caused by the oxygenation of the Si substrate. That is, the bands centered at 617 and 1,040-1,120 cm -1 present close relation with the Si substrates [16,17]. The band located at 809 cm -1 maybe correlate to Ni 2?…”
Section: Resultsmentioning
confidence: 59%