2007
DOI: 10.1002/sia.2540
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Oxidation‐induced nanostructures on Cu{100}, Cu(Ag) and Ag/Cu{100} studied by photoelectron spectroscopy

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Cited by 13 publications
(13 citation statements)
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“…It shows the O KLL spectrum from Cu͑100͒ after 6.0ϫ 10 5 L exposure and the optimized surface morphology as obtained by extrinsic electron background analysis. 60,67 The structure consists of 20 and 3 Å thick oxide layers covering 20% and 80% of the surface, respectively. The O KLL transition is optimal for the analysis, because its background is not perturbed by spectral features of other transitions.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…It shows the O KLL spectrum from Cu͑100͒ after 6.0ϫ 10 5 L exposure and the optimized surface morphology as obtained by extrinsic electron background analysis. 60,67 The structure consists of 20 and 3 Å thick oxide layers covering 20% and 80% of the surface, respectively. The O KLL transition is optimal for the analysis, because its background is not perturbed by spectral features of other transitions.…”
Section: Resultsmentioning
confidence: 99%
“…[62][63][64][65] The former technique is described in detail in our previous studies. 60,61,66,67 The latter analysis was conducted with QUASES software package 68 and it yielded concentration of oxides and their in-depth distribution. The analysis process is based on computational morphology models using known information of the initial electron energy, inelastic electron mean free paths ͑IMFPs͒, ionization cross section, measurement geometry, energy dependence of the spectrometer transmission function, and attenuation described by the Beer-Lambert law.…”
Section: Experimental and Computational Methodsmentioning
confidence: 99%
“…39 We have previously investigated the nanoscale oxide formation on Ag/Cu͑100͒ surface alloy and polycrystalline Cu͑Ag͒ alloy by x-ray photoelectron spectroscopy ͑XPS͒, x-ray excited AES ͑XAES͒, and AES. 15,40 One of the main conclusions of these studies is that the oxygen adsorptioninduced segregation of Cu is operative on both silvercontaining samples leading to lower reactivity toward Cu surface oxidation. In this paper, we continue this investigation by combining in situ constant current topographic STM ͑CCT-STM͒ imaging and XPS/XAES/angle resolved XPS ͑ARXPS͒ methods to gain more detailed information on the surface segregation, oxidation kinetics, and especially local nanostructures forming on the Cu͑100͒ -c͑10ϫ 2͒-Ag surface at 373 K upon O 2 exposures.…”
Section: Introductionmentioning
confidence: 98%
“…While aluminum oxide ͑Al 2 O 3 ͒ forms uniform diffusion barrier resulting in a stable self-passivated surface, 6 copper oxides ͑Cu 2 O, CuO͒ grow nonuniformly as three-dimensional islands deeper into the bulk material. [7][8][9][10][11][12][13][14][15][16] Functionalization and passivation of a copper surface are typically governed by alloying or employing barrier layers. Self-encapsulation and passivation of copper damascene structure in interconnects are achieved, e.g., by a titanium nitride, 17,18 tantalum nitride, 19 or silver barrier layer.…”
Section: Introductionmentioning
confidence: 99%
“…The XPS high-resolution spectra of C 1s, O 1s, Cu 2p and Cu LMM peaks were analysed. The analysis procedure of the Cu LMM transition is described elsewhere in more detail [16]. The inelastic electron energy-loss background thickness analysis was performed with QUASES software package [17], using reference spectra of experimentally obtained line shapes of metallic Cu, Cu 2 O and PET.…”
Section: Methodsmentioning
confidence: 99%