1979
DOI: 10.1007/bf00812775
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Oxidation mechanism of titanium nitride in oxygen

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Cited by 83 publications
(49 citation statements)
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“…This confirms the different degree of oxidization of TiN indicated by the XRD analysis shown in figure 1. It is known that TiN can be converted into TiO 2 by a complete oxidation at medium temperatures in air, 28,29 and that the oxidation occurred from the surface to the inner of the film due to the diffusion of O 2 . 30 Due to the incomplete oxidization, TiN and TiO 2 grains/layers may coexist and form hetero-junctions, which may enhance the separation efficiency of electrons and holes, and thus improve the photocatalytic performance.…”
Section: Resultsmentioning
confidence: 99%
“…This confirms the different degree of oxidization of TiN indicated by the XRD analysis shown in figure 1. It is known that TiN can be converted into TiO 2 by a complete oxidation at medium temperatures in air, 28,29 and that the oxidation occurred from the surface to the inner of the film due to the diffusion of O 2 . 30 Due to the incomplete oxidization, TiN and TiO 2 grains/layers may coexist and form hetero-junctions, which may enhance the separation efficiency of electrons and holes, and thus improve the photocatalytic performance.…”
Section: Resultsmentioning
confidence: 99%
“…[1] The large difference in molar volumes of TiO 2 and TiN results in spallation of the oxide scale, resulting in a transition from parabolic to pseudo-linear kinetics. [2,3] TiAlN coatings provide much improved high-temperature oxidation resistance, up to 750°C to 900°C, and have consequently been used extensively for high-temperature cutting operations with minimum use of lubricant or dry machining. [4] Titanium aluminum nitride (Ti 1-x Al x N) has the B1 NaCl structure with 0 £ x £ 0.52, but as x is increased, phase decomposition occurs into B1 NaCl and wurtzite AlN structures.…”
Section: Introductionmentioning
confidence: 99%
“…10 Here, the outer rutile scale grows by the outward diffusion of Ti, while the inner (SiO 2 , TiO 2 )-mixed scale grows by the inward diffusion of oxygen. On the other hand, the oxidation of TiN coatings or bulk is known to be controlled by the inward diffusion of oxygen through the TiO 2 layer, 3,4,13,14 which is enhanced by the grain boundaries of TiO 2 . However, in the present TiN-Ti 5 Si 3 composites, the outward diffusion of Ti +4 ions also occurred, due probably to the effect of impurities or different microstructures.…”
Section: Resultsmentioning
confidence: 99%
“…However, the disadvantage of this ceramic in high-temperature applications is that it oxidizes rapidly above 500°C. 3,4 Hence, in order to improve the oxidation resistance of TiN, Llauro et al 5 incorporated Ti 5 Si 3 into the TiN coatings by means of chemical-vapor deposition (CVD). They found that the Ti-N-Si codeposits were oxidized to TiO 2 , amorphous SiO 2 , or amorphous TiSiO during oxidation at 860-1170°C in air for up to 200 min.…”
Section: Introductionmentioning
confidence: 99%