2015
DOI: 10.1016/j.apsusc.2015.07.019
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Oxidation of the 8 × 8-reconstructed β-Si3N4(0 0 0 1) surface: A photoemission study

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Cited by 8 publications
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“…Besides, the surface of β‐Si 3 N 4 (0001) is only mildly affected by air exposure, and the nitride surface preserves its electronic properties (and that of the silicon substrate beneath) upon thermal oxidation. [ 19 ]…”
Section: Introductionmentioning
confidence: 99%
“…Besides, the surface of β‐Si 3 N 4 (0001) is only mildly affected by air exposure, and the nitride surface preserves its electronic properties (and that of the silicon substrate beneath) upon thermal oxidation. [ 19 ]…”
Section: Introductionmentioning
confidence: 99%