Oxidation of Thin Titanium Films: Determination of the Chemical Composition of the Oxide and the Oxygen Diffusion Factor

Sarvadii, S. Yu.; Гатин, А. К.; Харитонов, В. А.; Dokhlikova, N. V.; Ozerin, S. A.; Grishin, M. V.; Шуб, Б. Р.

doi:10.3390/cryst10020117

Cited by 9 publications

(4 citation statements)

References 46 publications

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“…This would be because Ti becomes oxidized easily. Ti NPs might turn into TiO 2 NPs immediately after they were taken out of the vacuum chamber and exposed to air [37,38].…”

Section: Capturing Charged Nps During Rf Sputtering With a Ti Targetmentioning

confidence: 99%

Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering

2020

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This study is based on the film growth by non-classical crystallization, where charged nanoparticles (NPs) are the building block of film deposition. Extensive studies about the generation of charged NPs and their contribution to film deposition have been made in the chemical vapor deposition (CVD) process. However, only a few studies have been made in the physical vapor deposition (PVD) process. Here, the possibility for Ti films to grow by charged Ti NPs was studied during radio frequency (RF) sputtering using Ti target. After the generation of charged Ti NPs was confirmed, their influence on the film quality was investigated. Charged Ti NPs were captured on amorphous carbon membranes with the electric bias of −70 V, 0 V, +5 V, +15 V and +30 V and examined by transmission electron microscopy (TEM). The number density of the Ti NPs decreased with increasing positive bias, which showed that some of Ti NPs were positively charged and repelled by the positively biased TEM membrane. Ti films were deposited on Si substrates with the bias of −70 V, 0 V and +30 V and analyzed by TEM, field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD) and X-ray reflectivity (XRR). The film deposited at −70 V had the highest thickness of 180 nm, calculated density of 4.974 g/cm3 and crystallinity, whereas the film deposited at +30 V had the lowest thickness of 92 nm, calculated density of 3.499 g/cm3 and crystallinity. This was attributed to the attraction of positively charged Ti NPs to the substrate at −70 V and to the landing of only small-sized neutral Ti NPs on the substrate at +30 V. These results indicate that the control of charged NPs is necessary to obtain a high quality thin film at room temperature.

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“…This would be because Ti becomes oxidized easily. Ti NPs might turn into TiO 2 NPs immediately after they were taken out of the vacuum chamber and exposed to air [37,38].…”

Section: Capturing Charged Nps During Rf Sputtering With a Ti Targetmentioning

confidence: 99%

Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering

2020

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“…Most researchers have focused on the development of thermal oxidation treatment for oxide surface growth and investigated the effects of temperature on the structural, microstructure, optical also Ti/O ratio in single-layer Ti films [25,26]. In contrast, developing a bilayer thin film to perform oxygen diffusion from the bottom to the upper layer has yet to be fully mastered.…”

Section: Introductionmentioning

confidence: 99%

The Phase Evolution and Photocatalytic Properties of a Ti-TiO2 Bilayer Thin Film Prepared Using Thermal Oxidation

et al. 2021

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Ti-TiO2 bilayer thin films were successfully prepared onto a glass substrate using magnetron sputtering with different TiO2 bottom layer conditions. These represent a lack of (as-deposited) and full oxygen content (annealed). Single-layer Ti was additionally used as a control. The influence of oxygen diffusion phenomena of the bottom layer of TiO2 to the upper layer of Ti thin films at different oxidation temperatures on structural, optical, and photocatalytic performance was investigated. X-ray diffraction (XRD) results confirmed that the crystalline phases coexisting on thin-film samples oxidized at 450 °C were TiO, TiO1.4, (bilayer, as-deposited TiO2), anatase (bilayer, annealed TiO2), and rutile (single and bilayer). This finding showed that the film’s phase structure evolution is significantly affected by oxygen diffusion from the bottom layer. Further increasing the thermal oxidation temperature caused a notable decline in the amorphous zone in bilayer thin films based on TEM analysis. Bilayer thin films lead to higher degradation of methylene blue under UV light radiation (63%) than single-layer films (45%) oxidized at 450 °C. High photocatalytic activity performance was found in the bilayer annealed TiO2-Ti thin-film sample. This study demonstrates that the bilayer modification strategy promotes the oxygen-induced bottom layer of TiO2 bilayer thin films.

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“…It is accompanied by the pitting of metal particles and the formation of soluble vanadium and aluminum compounds that have a toxic effect on the human body and can result in inflammatory processes in the tissues [3]. To increase the chemical stability and to impart functional properties to the surface of titanium materials the following methods are used for the formation of artificial oxide coatings, for example the thermal and plasma oxidation [4,5], combined electrochemical and hydrothermal deposition [6], and the diffused [7] or electrochemical oxidation [8,9]. The latter method of oxidation is the most widely spread, because it allows to obtain the homogeneous films of the predetermined thickness and structure [10,11] on the articles of any configuration.…”

Section: Literature Review and Formulation Of The Research Problemmentioning

confidence: 99%

Electrochemical Formation of Oxide Films on the Titanium Alloy of Ti6Al4V in Ethylene Glycol-Water Electrolytes to Produce Bioinert Coatings and Increase the Corrosion Resistance of Medical Implants

Smirnova

Nikonov

Mukhina

et al. 2021

MSF

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The research data on the specific features of the formation of oxide films on the Ti6Al4V alloy in the ethylene glycol-water electrolytes have been given. The kinetic dependences obtained for the alloy allowed us to establish that the specific features of the formation of oxide films during the electrochemical oxidation of the alloy surface depend on the solution composition and the current density. For the water-to-alcohol ratio of 50:50 the kinetic dependences show the sections that correspond to the formation of the barrier oxide layer and also to the formation of the pores due to the desorption of fluoride ions and the growth of the porous portion of oxide. As the water-to- alcohol ratio is decreased the indicated peculiarities of kinetic dependences are met not so often and do not obey any regularity. The obtained data are explained by the fact that an increase in the portion of the organic component of the solution results in a decreased etching capacity of the electrolyte due to the controlled activity of fluoride ions. The anode current density value has a similar effect on the variation of kinetic dependences. Its effect is explained by that an increase in the alloy oxidation rate results in the fast formation of the surface oxide and the specific features of kinetic curves are concealed. The linear relationship between the formation time of oxide of a minimum thickness for given conditions and the current density is unavailable and it is conditioned by the chemical interaction of the oxide film with electrolyte components. The obtained research data can be used for the formation of the individual bioinert and bioactive coatings for the implants of a medical purpose or for the formation of the matrix used for the production of composite coatings.

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Oxidation of Thin Titanium Films: Determination of the Chemical Composition of the Oxide and the Oxygen Diffusion Factor

Cited by 9 publications

References 46 publications

Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering

Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering

The Phase Evolution and Photocatalytic Properties of a Ti-TiO2 Bilayer Thin Film Prepared Using Thermal Oxidation

Electrochemical Formation of Oxide Films on the Titanium Alloy of Ti6Al4V in Ethylene Glycol-Water Electrolytes to Produce Bioinert Coatings and Increase the Corrosion Resistance of Medical Implants

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