Oxide and fluoride coatings for the excimer wavelength 193nm

Götzelmann, R.; Hagedorn, Harro; Zöller, A.; Kobiak, Alexei; Klug, Werner

doi:10.1117/12.625152

Cited by 5 publications

(3 citation statements)

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“…Moreover, they have good mechanical property, chemical stability and compatibility with other coating materials. In the ultra-violet, they have been widely used to construct optical multilayer components with other fluorides, such as AlF 3 [3,4], MgF 2 [5] and others.…”

Section: Introductionmentioning

confidence: 99%

The determination of infrared optical constants of rare earth fluorides by classical Lorentz oscillator model

Su¹,

Li²,

Liu³

et al. 2007

J. Phys. D: Appl. Phys.

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Rare earth fluoride (REF3, RE = La, Ce, Pr, Sm, Er, Yb, Y) films were deposited on Ge(1 1 1) and silicon wafers in order to determine optical constants from the near infrared up to the high frequency tail of the reststrahlen band. The FT-IR transmission spectrum and the reflection spectrum were used to examine the infrared optical properties of the fluorides. The optical constants of the films in the infrared spectrum from 2 to 20 µm were calculated using the classical Lorentz oscillator model by fitting the transmission spectrum. The reflective spectrum of the fluorides on silicon was used to demonstrate the absorption difference in this region. It is found that the extinction coefficients of rare earth fluorides films with Pnma structure (REF3, RE = Y, Yb, Er) are larger than the other fluorides films with structure (REF3, RE = La, Ce, Pr, Sm) from 15 to 20 µm.

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Section: Introductionmentioning

confidence: 99%

The determination of infrared optical constants of rare earth fluorides by classical Lorentz oscillator model

Su¹,

Li²,

Liu³

et al. 2007

J. Phys. D: Appl. Phys.

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“…The principle of plasma IAD process control is described in previous papers 3,4,5 . The presented coatings were manufactured in a Syruspro 1100 DUV batch coater, equipped with 2 EB-guns, a plasma source (APS), a planetary system and an additional substrate heating.…”

Section: Methodsmentioning

confidence: 99%

“…The Syruspro 1100 DUV box-coater series is the reliable tool for UV and DUV coatings 3,4,5 . The electropolished chamber is equipped with EB-guns and thermal sources for the evaporation of the most commonly used oxide and fluoride coating materials.…”

Section: Introductionmentioning

confidence: 99%

Advances in direct monochromatic monitoring for the DUV range

Arhilger,

Hagedorn,

Zoeller

2024

Advances in Optical Thin Films VIII

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Monochromatic monitoring by intermittent measuring technique is established as a standard optical thickness control for thin films in box coaters since 2005 1 . A newly developed set-up of the optical path was designed for the Syruspro 1100 DUV box-coater series. A deuterium lamp in combination with an achromatic lens system extends the monitoring capabilities to the UV range for wavelengths from 200nm up to 380nm. We present the hardware set-up and coating results for various DUV coatings.

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Anti-Reflective Fluoride Coatings for Widely Tunable Deep-Ultraviolet Diode-Pumped Solid-State Laser Applications

Lin

Han

et al. 2010

Chinese Phys. Lett.

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An anti-reflective (AR) fluoride coating in the 170-230 nm spectral range is prepared by the thermal evaporation method for the applications of widely tunable deep-ultraviolet diode-pumped solid-state lasers. The transmittance of an AR coated calcium fluoride (CaF2) window in thickness 3 mm is measured to be in the range of 95.8% at 170 nm to 97.1% at 230 nm, with the maximum transmittance 99.2% and the minimum residual reflectance 0.04% appeared at 195 nm. The experimental results indicate that treating the AR coated window and the bare substrate with ultraviolet irradiation can significantly improve their optical performance.

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Oxide and fluoride coatings for the excimer wavelength 193nm

Cited by 5 publications

References 0 publications

The determination of infrared optical constants of rare earth fluorides by classical Lorentz oscillator model

The determination of infrared optical constants of rare earth fluorides by classical Lorentz oscillator model

Advances in direct monochromatic monitoring for the DUV range

Anti-Reflective Fluoride Coatings for Widely Tunable Deep-Ultraviolet Diode-Pumped Solid-State Laser Applications

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