Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors

Silicon Porosification: Approaches to PSi Parameters Control

“…The remarkable thermal isolation capabilities of PSi suggested several applications in the realization of on-chip thermal sensors (Lysenko et al 1998), radiation detectors , gas-sensing devices (Maccagnani et al 1998;Kaltsas and Nassiopoulou 1999), and the realization of ultrasonic emitters (Shinoda et al 1999;Koshida et al 2013 Similar values for thermal constants are encountered in the field of Si nanowires (Li et al 2003) produced in a variety of methods with reduced disorder with respect to electrochemically etched PSi. From a general point of view, nanostructuring is nowadays considered one of the most promising approaches to on-chip thermal isolation (Leadley et al 2014;Lucklum et al 2014a,b) even for employment at cryogenic temperatures (Valalaki and Nassiopoulou 2014).…”

Biosensors Based on the Photoluminescence of Porous Silicon. Overall Characteristics and Application

“…Возможность раз-работки таких устройств продемонстрирова-на на примере определения ионов Na + [48]. Предложено использовать ПК и в качестве проводника света при создании оптических сенсоров [49], а также продемонстрирована возможность использования толстых окислен-ных образцов ПК в качестве эффективного те-плового изолятора для калориметрических биосенсоров [50]. Тепловая проводимость ПК уменьшается при увеличении плотности тока и времени анодизации в процессе его получе-ния.…”

Micro-chip initiator realized by integrating Al/CuO multilayer nanothermite on polymeric membrane

“…Nevertheless, this kind of microheater shows some limitations due to its relatively high power consumption. To improve the microheater performance, studies employ thin (a few μm) dielectric SiO 2 /SiN x membranes [34] or a porous silicon bed to assure lower power consumption [37,38]. Such solutions do provide improvement in terms of microheater power consumption.…”