Oxime Type Photoacid Generators Having Adamantyl and Superstrong Acid Precursor Group

Abstract

Oxime derivatives, having a N-O bond in the molecule structure, are excellent photo reactive compounds.Oxime type photoacid generaters with adamantyl and perfluoroalkylsulfonyloxy groups and without aromatic groups were prepared, and their absorption spectra and thermal properties were measured. The compounds designed with photoacid generator in deep ultraviolet (DUV) region have good transparency in the region. The thermal stability of these PAGs depended on the chain length of acid precursor groups. The quantum yields of acid generation were substantially high. These aliphatic oxime sulfonates can be expected to be PAGs in DUV.