Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface

The influence of crystallographic orientation on the wetting of silicon on quartz single crystals

“…In investigations of silicon crystal growth from a melt in fused quartz crucibles [19][20][21][22][23][24]26] oxygen is observed to dissolve from the quartz into the silicon melt. The oxygen solubility in the Si melt is very small [14,15], but it is well known Fig.…”

“…Moreover a detailed physical-chemical understanding of reactive wetting between liquid silicon melt and SiO 2 is important for the advanced crystal growth of silicon [16][17][18][19][20][21][22][23][24][25][26][27]. Several wetting experiments with silicon melt on fused quartz have been reported in the literature [25][26][27], and complex dynamical spreading effects have been observed.…”

Investigation of oxygen distribution in electromagnetic CZ–Si melts with a transverse magnetic field using 3D global modeling

“…On the melt surface, the oxygen evaporation was taken into account according to the measurements of Togawa et al [5] as follows:…”

“…Since oxygen is incorporated into a crystal through the melt-crystal interface during a CZ growth process, it is necessary to investigate the oxygen transport mechanism in the molten silicon and particularly the distribution and concentra tion of oxygen on the growth interface. There have been many experiment studies [1][2][3][4] and theoretical studies [5,6] on the solubility and transport of oxygen in silicon melt in a conventional CZ growth. Huang et al [7] investigated the evaporation rate of oxygen from the melt surface.…”

Effects of temperature coefficient of surface tension on oxygen transport in a small silicon Cz furnace

“…In recent years, many numerical analyses [1][2][3][4][5][6][7][8][9][10][11] have been conducted on the melt flow and the oxygen transport in the silicon melt. In these works, the Marangoni effect has not been taken into account.…”