P‐174: Piezoelectric Tuning Technology to Compensate for Variation in Resonant Frequency in a MEMS Mirror

Abstract

An effective method to tune the resonant frequency of a micro scanning mirror with a piezoelectric element is presented. Though the resonant frequency (fr) is determined by the structure and size of the micromirror and the torsion bar, the fr varies according to the environmental temperature, driving voltage, and fatigue of the torsion beams. We have developed an effective mechanism to control the stress of the torsion bars using the piezoelectric elements and we succeeded in tuning 0.9% of the resonant frequency of the scanning mirror which corresponds to the variation of the emvironmental temperature with 83 degree.

72.3: A Direct‐View Laser‐Phosphor Display with a High‐Reflection Wide‐Angle‐Scanner

“…In the previous work, we developed a silicon based resonant driven optical scanner with piezoelectric actuators. The mirror had a rectangular shape and was 1.4 × 0.9 mm in size and 50 m in thickness [4]. According to the simulation result, the diameter of the new horizontal scanning mirror was 1.8 times larger than that of the previous one.…”