Design and analysis of insertion loss and linearity enhancement technique for PIN diode RF switches are presented. Measurements show a 12.5% insertion loss improvement by optimizing anode-to-cathode distance, a 3.29% reduction of intrinsic resistance by choosing the octagonal shape over the square one, and a 1 dB P 1dB improvement by using the new cathode biased technique. A low insertion loss and high isolation single-pole double-throw (SPDT) switch has been built with the proposed PIN diode.