“…The growth of m-plane GaN has been reported on g-LiAlO 2 (1 0 0) [7,13], m-plane SiC [14], and bulk m-plane GaN substrates [15,16], all of which have limited availability or high cost. Silicon is a very attractive substrate for the growth of GaN due to its high quality, good thermal conductivity, low cost, availability in large sizes, and the ease with which Si can be selectively removed before packaging if needed.…”