Tagungsband 2015
DOI: 10.5162/12dss2015/p3.11
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P3.11 - Experimental and numerical evaluation of interdigitated electrode array for monitoring gaseous sterilization processes

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Cited by 2 publications
(1 citation statement)
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“…The additional T term is the thickness of the electrodes, which is 200 nm. As the fingers are completely covered by the coating, the dielectric constant between them is due to the dielectric constant of the coating [81]. Table 2 shows the dimensions of the four IDEs used and the estimated nominal capacitance, and Figure 17 shows the layout for the four IDEs.…”
Section: Ide Parametersmentioning
confidence: 99%
“…The additional T term is the thickness of the electrodes, which is 200 nm. As the fingers are completely covered by the coating, the dielectric constant between them is due to the dielectric constant of the coating [81]. Table 2 shows the dimensions of the four IDEs used and the estimated nominal capacitance, and Figure 17 shows the layout for the four IDEs.…”
Section: Ide Parametersmentioning
confidence: 99%