Packageless AlN/ZnO/Si Structure for SAW Devices Applications

Monitored vacuum deposition of dielectric coatings over surface acoustic wave devices

“…The most important properties of the results (such as frequency response variation with thickness increase) obtained from the simulation model [16,17] adequately reflect the characteristics of the in-situ measured structure. However, we cannot deny the obvious differences.…”

Frequency-based detection of female Aedes mosquito using surface acoustic wave technology: Early prevention of dengue fever

“…A material with high phase velocity, large electromechanical coupling coefficient (K 2 ), and low temperature coefficient of frequency (TCF) is desirable [22]. However, device performance and sensitivity are dramatically affected by the thickness and properties of each layer in the structure of layered SAW devices [23]. A 128º YX cut LiNbO 3 substrate was selected for the female Aedes mosquito sensors because of its high SAW velocity (3996 m/s) and large electromechanical coupling coefficient (5.5%) [24].…”

Packageless temperature sensor based on AlN/IDT/ZnO/Silicon layered structure

“…Theoretical investigation was realized by a finite element method (FEM) using COMSOL Multiphysics [9]. The full delay line was simulated and liquid was modeled by an additional layer on the top of the AlN film.…”