Parallel large-range scanning confocal microscope based on a digital micromirror device

Liu

et al. 2019

Sensors

At present, visual imaging is widely applied for surface defects such as bumps and scratches in the manufacture of precise parts with a highly reflective surface. However, the high light reflection and halo disturbance as a result of the illumination in visual imaging exert a direct influence on the accuracy of defect detection. In this regard, the present paper develops an adaptive illumination method based on space–time modulation for a visual imaging system. Furthermore, a digital micro-mirror device (DMD) is employed to realize the pixel-level spatiotemporal modulation of illumination. Then, in combination with the illumination intensity feedback of charge coupled device (CCD), the time-space ratio is adjusted automatically to achieve adaptive uniform illumination and effectively suppress the high light reflection and halo disturbance of highly reflective surfaces. The experimental results show that, in terms of restraining high light disturbance, the visibility and accuracy of visual imaging are improved.

Section: The System For Visual Imagingmentioning

confidence: 99%

Smooth Surface Visual Imaging Method for Eliminating High Reflection Disturbance

Liu

et al. 2019

Sensors

“…This method keeps the high resolution of confocal microscopy and improves the detection speed simultaneously. It provides the convenience for three‐dimensional contour measurement of micro‐nano artifacts (Zhang et al ., ). However, there are few reports in the application of DMD within fluorescence cell detection.…”

Section: Introductionmentioning

confidence: 97%

Parallel detection experiment of fluorescence confocal microscopy using DMD

et al. 2015

Parallel detection of fluorescence confocal microscopy (PDFCM) system based on Digital Micromirror Device (DMD) is reported in this paper in order to realize simultaneous multi-channel imaging and improve detection speed. DMD is added into PDFCM system, working to take replace of the single traditional pinhole in the confocal system, which divides the laser source into multiple excitation beams. The PDFCM imaging system based on DMD is experimentally set up. The multi-channel image of fluorescence signal of potato cells sample is detected by parallel lateral scanning in order to verify the feasibility of introducing the DMD into fluorescence confocal microscope. In addition, for the purpose of characterizing the microscope, the depth response curve is also acquired. The experimental result shows that in contrast to conventional microscopy, the DMD-based PDFCM system has higher axial resolution and faster detection speed, which may bring some potential benefits in the biology and medicine analysis. SCANNING 38:234-239, 2016. © 2015 Wiley Periodicals, Inc.

“…In a classic confocal microscopy system, vertical scanning is required to generate a Depth Response Curve (DRC), the peak of which specifies the height of the current measurement points. To perform fast areal measurements, high-speed lateral scanning techniques have been maturing in the recent decade, such as Nipkow disk [5], micro lens array (MLA) [6], and digital micromirror device (DMD) [7]. However, height measurement based on vertical scanning on each measurement point is still the efficiency bottleneck for most conventional, monochrome confocal systems.…”

Section: Introductionmentioning

confidence: 99%

Calibration of a Chromatic Confocal Microscope for Measuring a Colored Specimen

Zhang

Zhou

et al. 2018

IEEE Photonics J.

In this paper, a color correction method is proposed to improve measurement accuracy for chromatic confocal microscopy (CCM) when measuring a colored specimen. Characteristic curve shifting due to selective reflection from color surfaces was analyzed based on a laboratory CCM system developed by the authors' team. Theoretically, when the color of the targeted surface is different from that represented by the central wavelength of the light source, the characteristic curve of CCM would have a notable deviation from that of an achromatic surface. In this study, this conclusion was verified through both simulation and experiments. Using a set of standard color calibration pieces, a color correction method was proposed accordingly to quantify the characteristic curve shifting. To validate the proposed method, a laser scanning confocal microscope Carl Zeiss LSM700 was used as the referencing system. Experimental data showed that with the color correction method, measurement errors can be controlled within 10 nm. Compared with the measurement without color correction, the measurement accuracy is significantly improved.