Parametric design of an electrostatic rotary microactuator using finite element analysis and metamodeling

Bronson, Jessica R.; Fassi, Irene

doi:10.1109/esime.2008.4525076

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2011

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“…As described in the previous part the device was parameterized, with different physical dimensions for evaluation (Bronson and Fassi 2008), see Table 1. By increasing the size of the device and increasing the surface of electrostatic attraction, the actuation voltage is reduced, but at the same time the response time is increased.…”

Section: Mechanical Partmentioning

confidence: 99%

A new design for rotational, tunable wideband RF MEMS capacitors

Pagazani¹,

Nicole²,

Rousseau

et al. 2011

Microsyst Technol

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Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.

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Section: Mechanical Partmentioning

confidence: 99%