Parametric Model Identification of Axisymmetric MEMS Resonators

Abstract

This paper proposes a technique for developing parametric models of modally degenerate resonators from stimulus-response data. The technique complements traditional empirical frequency response estimates that are commonly used for testing MEMS resonators, however, the parametric models have distinct advantages when the modal frequency differences are close enough to frustrate estimates of quality factors, natural frequencies and mode orientations. The proposed technique also completely rejects parasitic coupling between the stimulus and pick-off electrodes. It is shown how a modification of the algorithm using demodulated measurement signals greatly reduces storage and computational requirements.

A High-Precision Method of Stiffness Axes Identification for Axisymmetric Resonator Gyroscopes

“…From the model parameter matrices, the stiffness axes are estimated. Schein et al proposed a parametric modeling technique to estimate the stiffness axes for degenerate modes from the response data [ 30 ]. In their approach, they overcame the difficulties confronted by frequency-response-based methods when the frequency split is too small.…”

MEMS Resonator Parameter Estimation from Fast Frequency Sweeps

“…Alternatively, some methods seek to exploit transient measurements to perform parameter estimation with a more reasonable time scale; the golden standard for high , low resonators is the "ringdown" method, which consists in measuring the decaying oscillations of a free resonator. Several variants of this method have been proposed in recent years, extending its use from the case of a single degree-of-freedom resonator to multiple degrees-of-freedom, nonlinear resonators [3][4][5]. Although ringdown methods are the fastest and are intrinsically immune to feedthrough, they also have a few limitations: some parameters cannot be identified (e.g.…”