Partial discharge characteristics of C6F12O/CO2 mixed gas at power frequency AC voltage

Abstract

The greenhouse effect of SF6 has made its application in various types of gas-insulated equipment increasingly restricted. C6F12O combines the advantages of insulation strength, safety and environmental friendliness and is considered to have potential for use in medium and low voltage equipment when mixed with buffer gas. In this paper, an experimental study on the partial discharge characteristics of C6F12O/CO2 mixed gas was carried out. The partial discharge initial voltage and the partial discharge extinction voltage of the mixed gas under the power frequency voltage are measured, and compared with the breakdown voltage. It was found that the partial discharge initiation voltage and the extinction voltage of the mixed gas gradually increased with the mixing ratio, and the influence of the gas pressure on the high mixing ratio was large. Compared with pure CO2, the difference between the partial discharge starting voltage and the breakdown voltage of the mixed gas is large. The research in this paper can provide guidance for the operation and maintenance of C6F12O mixed gas in the application of medium and low voltage equipment.

Dry Etching Performance and Gas-Phase Parameters of C6F12O + Ar Plasma in Comparison with CF4 + Ar

“…Particularly, it was suggested to substitute conventional process chemistries based on high-GWP fluorocarbon gases for alternate ones with lower environmental impacts [24,25]. One of the possible candidates here is the dodecafluorooxepane (C 6 F 12 O) which exhibits low GWP index of 1, has the extremely low toxicity, as well as is featured by the boiling point above the room temperature [26]. Obviously, the last property provides the much easier trapping of remaining gas from the output gas flow compared with conventional gaseous fluorocarbons as well as promotes its recovery procedure.…”

Eco-friendly gas insulating medium for next-generation SF6-free equipment

“…At present, several kinds of eco-friendly MV-GIE have been developed. The first C 5 F 10 O/air based ring main units (RMU) was proposed by ABB in 2015 (Figure 12(a)) [226] , which was installed as compact secondary substations (CSS) in the Netherlands and long-term field experience was obtained. The 10.7 kPa C 5 F 10 O/129.3 kPa air gas mixture achieved a service voltage of 20 kV and loads up to 630 A.…”

Comparative study of CF4 + O2 and C6F12O + O2 plasmas for reactive‐ion etching applications

“…[20,21] One of the proposed candidates is dodecafluorooxepane (or perfluorooxepane, C 6 F 12 O), which has a GWP index of 1, is characterized by very low toxicity, and maintains a liquid state at temperatures below 50°C. [22] Obviously, the last feature provides easier extraction of nondissociated C 6 F 12 O molecules from the output gas and thus supports the development of the gas recycling procedure. At the same time, the use of C 6 F 12 O gas in existing RIE processes requires intensive research focused on both etching performance in respect to various materials and understanding of plasma chemistry.…”