Articles you may be interested inMeasuring the internal energies of species emitted from hypervelocity nanoprojectile impacts on surfaces using recalibrated benzylpyridinium probe ions High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films J. Vac. Sci. Technol. A 23, 671 (2005); 10. 1116/1.1943452 Surface induced dissociations of protonated ethanol monomer, dimer and trimer ions: Trimer break-down graph from the collision energy dependence of projectile fragmentation An overview of gaseous ion/surface collisions is presented, with special emphasis on the behavior of polyatomic projectile ions at hyperthermal collision energies ͑1-100 eV͒ and the instrumentation needed for such studies. The inelastic and reactive processes occurring during ion/surface collisions are described in terms of several archetypes, viz., elastic and quasielastic scattering, chemical sputtering leading to release of surface material, inelastic scattering leading to surface-induced dissociation ͑SID͒ of the projectile, ion/surface reactions, and soft landing. Parameters that are important in ion/surface interactions are discussed, including the interaction time, the conversion of translational to internal energy, the translational energies of the scattered ions, the effects of scattering angle, and the influence of the nature of the surface. Different types of tandem mass spectrometers, built specifically to study ion/surface collision phenomena, are discussed and the advantages and disadvantages of the individual designs are compared. The role of SID as a technique in bioanalytical mass spectrometry is illustrated and this inelastic collision experiment is compared and contrasted with gas-phase collision-induced dissociation, the standard method of tandem mass spectrometry. Special emphasis is placed on reactive scattering including the use of ion/surface reactions for surface chemical analysis and for surface chemical modification.