high-throughput particle manipulation for preparation, enrichment, and quality control. For example, the size distribution of synthesized nanoparticle catalysts determines their catalysis efficiency. [7,8] In biomedical applications, exosomes, which are submicron extracellular vesicles [9][10][11] containing DNA, microRNAs, and proteins, are a potential source of diagnostic biomarkers. [12][13][14][15] Suitable nanoparticle manipulation tools would enable sizebased sorting/filtering, or manipulation toward downstream activities such as multiplexed diagnostics, nanoelectronic/ robotic constructions, [16,17] and nanoparticle-based drug delivery systems. [18] Conventional particle separation techniques [19] are based on differential density and size, e.g., ultracentrifugation, [20] ultrafiltration, [21] and size exclusion chromatography. [22] Although impressive progress has been made in the last decade, many nanoparticle manipulation tools suffer from high cost, low throughput, and specimen damage. [23][24][25] Scalable nano-and submicron particle patterning has thus traditionally relied on self-assembly methods [26] or oligomer templating [27] however, these are largely unable to produce deterministic singlenanoparticle positioning, they are irreversible, and they require specific reagents or lengthy processing. [28][29][30] Moreover, drug delivery systems which incorporate efficient nanoparticle concentration are creating new avenues for cancer treatment. [31,32] There is, therefore, a pressing need to develop a fast, precise, and scalable method for nano-and submicron scale manipulation.Microfluidic devices have emerged as a viable platform for particle manipulation using magnetic, [33] optoelectronic, [34] plasmonic, [35] electrokinetic, [36] and hydrodynamic [37] forces. Applying these principles at the nanoscale instead of the microscale, however, can result in far smaller force magnitudes, poor separation efficiency, and channel clogging. [38] Furthermore, most of these manipulation methods are constrained by their dependence on particle polarizability, the need for low conductivity medium (which is often not biocompatible), and heating of the surrounding fluid. Optical tweezers [39,40] provide the highest degree of spatial resolution but they are usually applied in static fluids, owing to the relatively small forces that can be generated, [41] and only small numbers of nanoparticles can be manipulated at any one time (those within the Nanoacoustic fields are a promising method for particle actuation at the nanoscale, though THz frequencies are typically required to create nanoscale wavelengths. In this work, the generation of robust nanoscale force gradients is demonstrated using MHz driving frequencies via acoustic-structure interactions. A structured elastic layer at the interface between a microfluidic channel and a traveling surface acoustic wave (SAW) device results in submicron acoustic traps, each of which can trap individual submicron particles. The acoustically driven deformation of nanocavities gi...